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Flexible Audible Display using ITO on PVDF and Its Interface Analysis

Published online by Cambridge University Press:  01 February 2011

Dong-Hee Park ,
Sangyub Ie ,
Byeong-Taek Bae  and
Won-Kook Choi
Dong-Hee Park
Affiliation:
[email protected], Korea institute of science and technology, Seoul, Korea, Republic of
Sangyub Ie
Affiliation:
[email protected], Korea institute of science and technology, Seoul, Korea, Republic of
Byeong-Taek Bae
Affiliation:
[email protected], Korea institute of science and technology, Seoul, Korea, Republic of
Won-Kook Choi
Affiliation:
[email protected], Korea institute of science and technology, Seoul, Korea, Republic of
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Abstract

Flexible audible display (FAD) based on PVDF(Poly-vinylidene fluoride) film is researched to combine piezoelectric property with light emitting diode. Indium-Tin-Oxide (ITO) is deposited on PVDF film at low temperature condition with the vacuum web coating. Under the optimized working pressure and the oxygen/argon pressure ratio, ITO on PVDF shows good electrical property of sheet resistance about 120 ohm/sq at 160 nm thickness, good transmittance of 76%, and sound pressure level more than 70 dB. OLED device with Al/LIF/Alq3/ NPB/ 2T-NATA structure is fabricated on ITO/PVDF and shows the turn-on voltage of 3.5 V and the maximum luminescence of 1011.2 cd/cm2 at the driving voltage of 13 V. C-F chemical bondings are measured to decrease in the XPS spectrum of ITO/PVDF interface. This is originated from the bonding scission caused by incident energetic particles, such as sputtered atoms, backscattered Ar ions, and negative O ions during the sputtering and deposition process. These particles have energy, which is simulated by TRIM and is more than 5 eV, enough to cause the scission of C-F bondings with binding energy of 4 eV/atom.

Keywords

displayacousticbonding
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1116: Symposium I – Reliability and Properties of Electronic Devices on Flexible Substrates , 2008 , 1116-I02-03
Copyright
Copyright © Materials Research Society 2009

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References

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