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Film Synthesis on Powders by Cathodic ARC Plasma Deposition

Published online by Cambridge University Press:  21 February 2011

André Anders ,
Simone Anders ,
Ian G. Brown  and
Igor C. Ivanov
Simone Anders
Affiliation:
Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720
Ian G. Brown
Affiliation:
Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720
Igor C. Ivanov
Affiliation:
Charles Evans & associates, 301 Chesapeake Drive, Redwood City, CA 94063
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Abstract

Cathodic arc plasma deposition was used to coat Al2O3 powder (mesh size 60) with platinum. the power particles were moved during deposition using a mechanical system operating at a resonance frequency of 20 Hz. Scanning electron microscopy and auger electron microscopy show that all particles are completely coated with a platinum film having a thickness of about 100 nm. the actual deposition time was only 20 s, thus the deposition rate was very high (5 nm/s).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 388: Symposium Q – Film Synthesis and Growth Using Energetic Beams , 1995 , 215
Copyright
Copyright © Materials Research Society 1995

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