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FIB-assisted Pt Deposition for Carbon Nanotube Integration and 3-D Nanoengineering

Published online by Cambridge University Press:  11 February 2011

K. Dovidenko ,
J. Rullan ,
R. Moore ,
K. A. Dunn ,
R. E. Geer  and
F. Heuchling
K. Dovidenko
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
J. Rullan
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
R. Moore
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
K. A. Dunn
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
R. E. Geer
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
F. Heuchling
Affiliation:
School of NanoSciences and NanoEngineering, UAlbany Institute for Materials, The University at Albany-SUNY, 251 Fuller Rd., Albany, New York 12203
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Abstract

In this study, the Focused Ion Beam (FIB) instrument has been used for carbon nanotubes integration and nanoegineering studies. Results of thorough investigation (electrical, structural and chemical) of ultra-thin Pt contact lines and pads fabricated by the FIB, along with evaluation of nanomodification of the carbon nanotubes under the Ga+ ion beam and during Pt deposition are presented. The initial stages of FIB-assisted Pt deposition on multi-wall nanotubes are studied by transmission electron microscopy (TEM). The FIB parameters are optimized to provide non-destructive imaging and controllable Pt deposition with minimal damage on the nanotubes. We have demonstrated effective use of FIB-fabricated Pt pads as means of attaching the nanotubes to the substrate for atomic force and ultrasonic force microscopy studies.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 739: Symposium H – Three-Dimensional Nanoengineered Assemblies , 2002 , H7.7
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1. Ijima, S., Nature, 354, 56 (1991)Google Scholar
2. Biersack, J.P., Nucl. Instr. and Meth. B 27, 21 (1987).Google Scholar
3. Giannuzzi, L.A., Drown, J.L., Brown, S.R., Irwin, R.B., Stevie, F.A., Specimen Preparation for Transmission Electron Microscopy of Materials IV, Symposium, 19–27 (1997).Google Scholar
4. Ziroff, J., Rullan, J., Agnello, G., Dovidenko, K., Proceedings of MRS Spring 2003 meeting, Symposium: Nanotube-Based Devices, submitted.Google Scholar
5. Shekhawat, G.S., Kolosov, O.V., Briggs, G.A.D.. Shaffer, E.O., Martin, S., Geer, R.E., Proceedings of the IEEE 2002 International Interconnect Technology Conference, 96 (2000).Google Scholar