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Ferroelectric Thin Films by sol-gel Processing

Published online by Cambridge University Press:  21 February 2011

S. L. Swartz ,
P. J. Melling  and
C. S. Grant
S. L. Swartz
Affiliation:
Battelle Memorial Institute, 505 King Avenue, Columbus, Ohio 43201
P. J. Melling
Affiliation:
Battelle Memorial Institute, 505 King Avenue, Columbus, Ohio 43201
C. S. Grant
Affiliation:
Battelle Memorial Institute, 505 King Avenue, Columbus, Ohio 43201
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Abstract

The sol-gel processing of ferroelectric thin films is being investigated at Battelle. The ferroelectric materials included in this study are PbTiO3, Pb(Zr, Ti)O3 (PZT), and KNbO3. The sol-gel processing and crystallization of these films on fused silica, silicon, alumina, and single crystal SrTiO3 substrates is described.

Sol-gel derived PbTiO3 thin films crystallized into the expected tetragonal perovskite structure when heated to 500 C and above. However, the crystallization of sol-gel PZT (20/80) thin films was found to be substratedependent. The heat-treated PZT films were amorphous when deposited on silica and silicon substrates. Crystalline perovskite PZT films were produced on alumina substrates, and epitaxial PZT films were produced on single-crystal SrTiO3. Heat treatment of sol-gel KNbO3 films on silicon and alumina substrates resulted in the crystallization of a variety of non-perovskite phases, but epitaxial growth of KNbO3 was observed on single crystal SrTiO3.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 152: Symposium H – Optical Materials: Processing and Science , 1989 , 227
Copyright
Copyright © Materials Research Society 1989

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References

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