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Ferroelectric Films-Growth, Properties and Applications

Published online by Cambridge University Press:  16 February 2011

M.H. Francombe  and
S.V. Krisknaswamy
M.H. Francombe
Affiliation:
Westinghouse Science and Technology Center, Pittsburgh, PA 15235
S.V. Krisknaswamy
Affiliation:
Westinghouse Science and Technology Center, Pittsburgh, PA 15235
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Abstract

Thin films of ferroelectric and piezoelectric materials are playing a growing role as critical elements in microwave acoustic devices, infrared imagers, integrated optic circuits, optical displays and high-performance semiconductor memories. In this review, we discuss recent progress in the control of growth, structure and properties of the main candidate materials, such as piezoelectric ZnO and AlN, and ferroelectric PZT-based solid solutions, KNbO3, bismuth titanate (Bi4Ti3O12), LiNbO3, LiTaO3 and KNO3. Brief mention is also made of the role and status ferroelectric polymers and of the BaMF4 class of fluorides. The emphasis of the review is primarily on vacuum-processed films, and optimization of characteristics required for integration into solid-state or semiconductor components.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 179
Copyright
Copyright © Materials Research Society 1990

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References

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