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Ferroelectric Domain Inversion in LiNbO3 and its Application to High-Precision Piezoelectric Actuators

Published online by Cambridge University Press:  16 February 2011

Kiyoshi Nakamura  and
Ken Yamada
Kiyoshi Nakamura
Affiliation:
Faculty of Engineering, Tohoku University, Sendai 980, Japan
Ken Yamada
Affiliation:
Faculty of Engineering, Tohoku University, Sendai 980, Japan
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Abstract

Heat treatment of bare single-domain LiNbO3 plates near the Curie temperature induces a local polarization reversal, thereby yielding a ferroelectric inversion layer. For a sufficiently long heat treatment the inversion layer thickness becomes equal to one half of the plate thickness. Similar domain inversion is also induced by heat treatment of protonexchanged LiTaO3. These domain inversion phenomena and a model for explaining the mechanism are reviewed.

The inversion layer has piezoelectric constants opposite in sign to those of the uninveiled domain. Therefore, a LiNbO3 plate with such an inversion layer can be used as a piezoelectric actuator similar to the bimorph, because bending motion or torsional motion can be piezoelectrically produced, depending on the plate orientation. The measured characteristics of these actuators are presented and demonstrated to exhibit excellent linearity and no hysteresis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 360 , 1994 , 21
Copyright
Copyright © Materials Research Society 1995

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