Hostname: page-component-78c5997874-ndw9j Total loading time: 0 Render date: 2024-11-20T04:08:17.923Z Has data issue: false hasContentIssue false
  • English
  • Français

Fatigue Testing Machine of Micro-Sized Specimens for MEMS Applications

Published online by Cambridge University Press:  10 February 2011

Y. Higo ,
K. Takashima ,
M. Shimojo ,
S. Sugiura ,
B. Pfister  and
M. V. Swain
Y. Higo
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JAPAN, [email protected]
K. Takashima
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JAPAN, [email protected]
M. Shimojo
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JAPAN, [email protected]
S. Sugiura
Affiliation:
Nissei Sangyo Co. Ltd., 1-24-14 Nishi-shimbashi, Minato-ku, Tokyo 105-8717, JAPAN
B. Pfister
Affiliation:
CSIRO, Bradfield, NSW 2070, Australia
M. V. Swain
Affiliation:
Biomaterials Science Research Unit, University of Sydney, Australian Technology Park, Eveleigh, NSW 1430, Australia
Get access

Abstract

A new type of fatigue testing machine for micro-sized specimens for MEMS applications has been developed. This fatigue testing machine consists of a magnetostrictive actuator which is able to impart small displacements to a specimen upto 20 νm with resolution of 5 nm. The actuator is connected to a metal shaft and a diamond tip of 5 νm in radius is attached to the end of the shaft. Small displacements are applied to the specimen through the diamond tip. This makes it possible to construct a high stiffness loading fixture. The magnitude of load applied to the specimen is measured by a strain gauge type load cell with a load resolution of 10 νN. The specimen stage and load cell can be moved to adjust the loading position precisely by a stepping motor at a translation resolution of 0.1 νm. Cantilever beam type specimens with dimensions of 10 × 12 × 50 νm3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Very small cyclic load (ΔP = 0.1 - 40 mN) was able to be applied to the specimen successfully. This machine appears to be promising for evaluation of fatigue properties for micro-sized specimens for MEMS applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 241
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. , Sharpe Jr., , W. N., Yuan, B. and Edwards, R. L., J. Microelectromechanical Systems, 6, 931 (1997).Google Scholar
2. Sato, K., Yoshioka, T., Ando, T., Shikida, M. and Kawabata, T., Sensors and Actuators A: Physical, 70, 148 (1998).Google Scholar
3. Tsuchiya, T., Tabata, O., Sakata, J. and Taga, Y., Trans. Inst. Electrical Eng. Japan, 116-E, 441 (1996).Google Scholar
4. Read, D. T. and Dally, J. W., J. Electronic Packaging, 117, 1 (1995).10.1115/1.2792062Google Scholar
5. Sharpe, W. N. Jr, and Turner, K. T. in Proc. 7th Int. Fatigue Congress, edited by Wu, X. R. and Wang, Z. G. (Higher Education Press, Beijing, China, 1999) pp. 1837–1844.Google Scholar
6. Cornella, G., Vinci, R. D., Suryanarayanan, R., Daukardt, R. H. in Microelectromechanical Structures for Materials Research, edited by Brown, S., Gilbert, J., Guckel, H., Howe, R., Johnson, G., Krulevitch, P., Muhlstein, C. (Mater. Res. Soc. Proc. 518, Pittsburgh, PA, 1998) pp. 81–86.Google Scholar
7. Takashima, K., Kimura, T., Shimojo, M., Higo, Y., Sugiura, S. and Swain, M. V. in Proc. 7th Int. Fatigue Congress, edited by Wu, X. R. and Wang, Z. G. (Higher Education Press, Beijing, China, 1999) pp. 1871–1876.Google Scholar
8. Gilbert, C. J. and Ritchie, R. O., Appl. Phys. Lett., 74, 476 (1997).Google Scholar