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Fatigue and Aging in Sol-Gel Derived PZT Thin Films

Published online by Cambridge University Press:  16 February 2011

W.H. Shepherd
W.H. Shepherd*
Affiliation:
National Semiconductor Corporation, Fairchild Research Center, M/S E140, P. O. Box 58090, Santa Clara, CA 95052–8090
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Abstract

Typical fatigue and aging characteristics are reported for thin PZT films prepared using sol-gels. The fatigue process occurs in two steps. There is an initial period, during which the domain matrix of the as formed film is restructured by the cycling and the polarization generally increases, followed by a period in which the polarization decays. The polarization decay may be due, in part, to the formation of dielectric layers at the electrodes. The effects of voltage and temperature on fatigue are reported. Aging is examined as a function of temperature. Measurements of internal bias fields do not support the view that they are the primary cause of aging. Neither fatigue nor aging are temperature sensitive making identification of specific physical processes difficult.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 277
Copyright
Copyright © Materials Research Society 1990

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References

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