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Failure Investigation of Polymer Mechanical Micromponents

Published online by Cambridge University Press:  26 February 2011

Yi Zhao  and
Xin Zhang
Yi Zhao
Affiliation:
[email protected], The Ohio State University, Department of Biomedical Engineering, 294 Bevis Hall, 1080 Carmack Road, Columbus, OH, 43210, United States
Xin Zhang
Affiliation:
[email protected], Boston University, Department of Manufacturing Engineering, 15 Saint Mary's Street, Bookline, MA, 02446, United States
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Abstract

This paper reports typical failure modes of polymer microstructures. Polydimethylsiloxane (PDMS) microstructures were fabricated using replication-based methods. The mechanical collapses of these structures were observed using scanning electron microscopy. In this work, we classified the mechanical collapses based on their individual geometries and discussed the mechanism of each failure mode. We also worked on solutions to recover these failed PDMS structures. This work helps to better understand the collapsing mechanism and to facilitate the development of control strategies to enhance the mechanical reliability of polymer microdevices.

Keywords

microelectro-mechanical (MEMS)polymermicrostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 975: Symposium DD – Mechanics of Biological and Bio-Inspired Materials , 2006 , 0975-DD06-09
Copyright
Copyright © Materials Research Society 2007

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References

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