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Fabrication of the Large-Area Integrated a-Si Solar Cells

Published online by Cambridge University Press:  28 February 2011

S. Yamazaki
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
M. Abe
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
S. Nagayama
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
K. Shibata
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
M. Susukida
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
T. Fukada
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
M. Kinka
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
I. Kobayashi
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
T. Inushima
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
K. Suzuki
Affiliation:
Semiconductor Energy Laboratory, Co., Ltd. 398 Hase, Atsugi-shi, Kanagawa-ken 243 Japan
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Abstract

PIN-structure small-area solar cells using a-Si have been frequently reported on, but only a few reports are available on the study of solar cells using a large-area (10-cm square) substrate, all with a resultant conversion efficiency of above 9.0 %[1,2]. Our study has been concentrated on solar cells using a batch of ten 10-cm square substrates with an average conversion efficiency of 9.5 % or more.

As a result, without an anti-reflection coating on the surface of the glass substrate, the following values have been obtained: average conversion efficiency (EFF)=9.63 % (standard deviation of 0.195 %) -Open-circuit voltage (Voc)=12.668 V (standard deviation of 0.215 V) -Short-circuit current (Isc)=78.467 mA (standard deviation of 1.619 mA) -Fill factor (FF)=0.6672 (standard deviation of 0.009)

The process, equipment and methods for measurements through which these results were obtained are described below.

Type
Articles
Copyright
Copyright © Materials Research Society 1986

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References

REFERENCES

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