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Fabrication of Microstructures for Microphotonic Circuit

Published online by Cambridge University Press:  17 March 2011

Subhasish Chakraborty ,
D G Hasko  and
R J Mears
Subhasish Chakraborty
Affiliation:
University of Cambridge, Department of Engineering, Trumpington Street Cambridge CB2 1PZ
D G Hasko
Affiliation:
University of Cambridge, Department of Engineering, Trumpington Street Cambridge CB2 1PZ
R J Mears
Affiliation:
University of Cambridge, Department of Engineering, Trumpington Street Cambridge CB2 1PZ
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Abstract

We describe fabrication of sub-micron photonic bandgap structures on Si/SiO2l optical waveguide, which could be used atλ=1.54μm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 694: Symposium K – Microphotonics 2001–Materials, Physics and Applications , 2001 , K8.4
Copyright
Copyright © Materials Research Society 2002

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References

[1] , Joannopoulos J. D., , Villeneuve, Fan, P. R. &, S. Photonic crystals: putting a new twist on light. Nature 386, 143–149 (1997).Google Scholar
[2] Soukoulis, C. M. (ed.) Photonic Band Gap Materials(Kluwer, Dordrecht, 1996).Google Scholar
[3] Joannopoulos, J. D., , Meade, Winn, R. D. &, J. N. Photonic Crystals (Princeton, New York, 1995).Google Scholar
[4] Krauss, T F., Rue, De La, R. & Band, S. Two-dimensional photonic bandgap structures operating at near-infrared wavelengths. Nature 383, 699–702 (1996).Google Scholar
[5] , Yablonovitch, E. Photonic band-gap structures. J. Opt. Soc. Am. B 10, 283–295 (1993).Google Scholar
[6] Foresi, J. S., Villeneuve, P. R., Ferrera, J., Thoen, E. R., Steinmeyer, G., Fan, S., Joannopoulos, J. D., Kimerling, L. C., Smith, Henry I. & Ippen, E. P.. Photonic-bandgap microcavities in optical waveguides. Nature 390, 143–145 (1997)Google Scholar
[7] Lee, K. K., Lim, D. R., Luan, H., Agarwal, A., Foresi, J. and Kimerling, L. C., “Effect of size and roughness on light transmission in a Si/SiO waveguide: Experiments and model,” Appl. Phys. Lett 77 1617 (2000)Google Scholar
[8] Plasma etching: an introduction/ edited by Manos, Dennis M., L, Daniel. Flamm Boston; London: Academic, Chapter 2.Google Scholar
[9] Fischer, P. B. and Chou, S. Y., “Sub-50 nm high aspect ratiosilicon pillars, ridges, and trenches fabricated using ultrahigh resolution electron beam lithography and reactive ion etching,” Appl. Phys. Lett. 62 1414 (1993).Google Scholar
[10] Paul, D. J., PhD thesis, Cambridge, 1993 Chapter 4.Google Scholar
[11] Yu, L. S., Guan, Z. F., Liu, Q. Z. and Lau, S. S., “Silicon on insulator photoelastic optical waveguide and polarizer,” Appl. Phys. Lett. 66 2016 (1995).Google Scholar