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Experimental Measurements of Grain Boundary Rotation Toward Bamboo in Post-Pattern Annealing

Published online by Cambridge University Press:  15 February 2011

D. L. Barr ,
W. L. Brown  and
M. Ohring
D. L. Barr
Affiliation:
Bell Laboratories, Lucent Technologies, 600 Mountain Ave., Murray Hill, NJ 07974
W. L. Brown
Affiliation:
Bell Laboratories, Lucent Technologies, 600 Mountain Ave., Murray Hill, NJ 07974
M. Ohring
Affiliation:
Stevens Institute of Technology, Castle Point, Hoboken, NJ 07030
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Abstract

The microstructure of 0.8.µm, A1(0.5% Cu) lines has been measured both before and after post-pattern annealing in nitrogen at various times and temperatures. Grain boundary inclinations in single grain segments of lines were determined from Focused Ion Beam (FIB) images of two surfaces of the lines. The statistical distributions of inclination angles before and after annealing reveal the tendency for boundaries to rotate to reduce their area. In these experiments the rotation stagnates with the normals to the grain boundaries having a distribution of inclinations with a FWHM of about 33 degrees around the line direction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 428: Symposium L – Materials Reliability in Microelectronics VI , 1996 , 237
Copyright
Copyright © Materials Research Society 1996

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