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Excimer Laser Induced Photochemistry of Silane-Ammonia Mixtures

Published online by Cambridge University Press:  25 February 2011

J. M. Jasinski ,
D. B. Beach  and
R. D. Estes
J. M. Jasinski
Affiliation:
IBM Research Division, Thomas J.Watson Research Center, Yorktown Heights, NY 10598
D. B. Beach
Affiliation:
IBM Research Division, Thomas J.Watson Research Center, Yorktown Heights, NY 10598
R. D. Estes
Affiliation:
IBM Research Division, Thomas J.Watson Research Center, Yorktown Heights, NY 10598
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Abstract

Steady-state and time resolved molecular beam sampling mass spectrometry have been used to study the ArF excimer laser induced photochemistry of silaneammonia mixtures at 193 nm. Under both steady state and single laser shot conditions, products as complicated as tetraaminosilane are formed promptly. A mechanism which accounts for the formation of all observed products is proposed and evaluated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 131: Symposium E – Chemical Perspectives of Microelectronic Materials I , 1988 , 501
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

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