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Excimer Laser Fabrication of Polycrystalline ZrO2 Layers

Published online by Cambridge University Press:  10 February 2011

N. Starbov ,
B. Mednikarov ,
V. Mankov ,
D. G. Georgiev ,
F. Hanus ,
K. Kolev  and
L. D. Laude
N. Starbov
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
B. Mednikarov
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
V. Mankov
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
D. G. Georgiev
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
F. Hanus
Affiliation:
University of Mons-Hainaut, Laboratory of Solid State Physics, av.Maistriau 23, Mons 7000, Belgium.
K. Kolev
Affiliation:
University of Mons-Hainaut, Laboratory of Solid State Physics, av.Maistriau 23, Mons 7000, Belgium.
L. D. Laude
Affiliation:
University of Mons-Hainaut, Laboratory of Solid State Physics, av.Maistriau 23, Mons 7000, Belgium.
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Abstract

Polycrystalline zirconia layers have remarkable low thermal conductivity and thermal expansion coefficient, high melting temperature and mechanical properties which are objects of interest in materials science. In this work thin polycrystalline zirconia films were obtained by two different excimer laser treatment ways. In the first one, pulsed laser deposition (PLD) is used to obtain directly as-deposited polycrystalline layers from a sintered, partially stabilized zirconia target. In the second one, excimer laser irradiation is used to crystallize previously electron gun-deposited amorphous zirconia films. Reflection high energy electron diffraction(RHEED) and low angle X-ray diffraction(LAXRD)-techniques were used to study the structure evolution of both types of films. In both cases, it is shown that cubic polycrystalline films are readily obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 217
Copyright
Copyright © Materials Research Society 1997

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References

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