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Evolution and Dynamics of Excimer Laser Vaporized YBa2Cu3O7−δ

Published online by Cambridge University Press:  01 January 1992

R. C. Dye ,
R. Brainard ,
S. R. Foltyn ,
R. E. Muenchausen ,
X. D. Wu  and
N. S. Nogar
R. C. Dye
Affiliation:
MS J565, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
R. Brainard
Affiliation:
MS J565, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
S. R. Foltyn
Affiliation:
MS J565, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
R. E. Muenchausen
Affiliation:
MS J565, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
X. D. Wu
Affiliation:
MS J565, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
N. S. Nogar
Affiliation:
MS J565, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
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Abstract

Pulsed laser deposition of thin films is a technology whose fundamental processes are often poorly understood. Because of the difficulty of monitoring in real time either the ablation process itself (the laser-solid interaction), or thin film growth (plume-substrate interaction), studies have largely relied on diagnostic studies of the ablated plume and the resulting film to infer details about other steps in the process. Information gained from this approach has helped improve the production of high-temperature superconducting thin films.

We have studied plume dynamics during the in-situ pulsed laser deposition of YBa2Cu3O7−δ thin films. The 248 and 308 nm lines of an excimer laser were used to generate a plume from a bulk YBa2Cu3O7−δ target. Both fast intensified CCD imaging and spectral diagnostics were used to monitor plume dynamics. Variations in the plume distribution as a function of processing gas, pressure, fluence, energy, and spot size were monitored by film composition and spectral-and time-resolved imaging.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 15
Copyright
Copyright © Materials Research Society 1993

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