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Evaluation of Compositional Change in Masklessly Deposited Lines by Micro-Rbs Analysis

Published online by Cambridge University Press:  25 February 2011

A. Kinomura ,
M. Takai ,
Y. F. Lu ,
S. Namba ,
M. Satou  and
A. Chayahara
A. Kinomura
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
M. Takai
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
Y. F. Lu
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
S. Namba
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
M. Satou
Affiliation:
Government Industrial Research Institute Osaka, Ikeda, Osaka 563, Japan
A. Chayahara
Affiliation:
Government Industrial Research Institute Osaka, Ikeda, Osaka 563, Japan
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Abstract

Compositional deviation from the standard stoichiometry of tin-oxide and silicon-oxide lines masklessly deposited by laser-induced thermochemical reaction was investigated by micro Rutherford backscattering (RBS). Micro-RBS spectra of the lines deposited with various laser powers indicated that the stoichiometry of the deposited lines for both tin-oxide and silicon-oxide was improved by the increase in laser power. A tomographic image of the tin-oxide line showed a compositional inhomogeneity across the line.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 311
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1 Ehrlich, D. J. and Tsao, J. Y., J. Vac. Sei. Tech. B1, 969 (1983).Google Scholar
2 see for example: Principles and Application of High Energy Ion Microbeams, ed. Watt, F. and Grime, G. W. (Adam Hilger, Bristol, 1987).Google Scholar
3 Doyle, B. L., Nucl. Instr. & Meth. B15, 654 (1986).Google Scholar
4 Kinomura, A., Takai, M., Matsuo, T., Satou, M., Chayahara, A. and Namba, S., Jpn. J. Appl. Phys. 28, L1286 (1989).Google Scholar
5 Takai, M., Kinomura, A., Inoue, K., Matsunaga, K., Izumi, M., Gamo, K. and Namba, S., Nucl. Instr. & Meth. B30, 260 (1988).Google Scholar
6 Tokuda, J., Takai, M., Gamo, K. and Namba, S., Mater. Res. Soc. Proc. 101, 261 (1988).Google Scholar
7 Lu, Y. F., Takai, M., Kinomura, A., Sanda, H. and Namba, S., submitted to Lasers in Materials Engineering.Google Scholar
8 Hobbs, C. P., McMillan, J. W. and Palmer, D. W., Nucl. Instr. & Meth. B30, 342 (1989).Google Scholar