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Evaluation of Compositional Change in Masklessly Deposited Lines by Micro-Rbs Analysis

Published online by Cambridge University Press:  25 February 2011

A. Kinomura ,
M. Takai ,
Y. F. Lu ,
S. Namba ,
M. Satou  and
A. Chayahara
A. Kinomura
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
M. Takai
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
Y. F. Lu
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
S. Namba
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
M. Satou
Affiliation:
Government Industrial Research Institute Osaka, Ikeda, Osaka 563, Japan
A. Chayahara
Affiliation:
Government Industrial Research Institute Osaka, Ikeda, Osaka 563, Japan
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Abstract

Compositional deviation from the standard stoichiometry of tin-oxide and silicon-oxide lines masklessly deposited by laser-induced thermochemical reaction was investigated by micro Rutherford backscattering (RBS). Micro-RBS spectra of the lines deposited with various laser powers indicated that the stoichiometry of the deposited lines for both tin-oxide and silicon-oxide was improved by the increase in laser power. A tomographic image of the tin-oxide line showed a compositional inhomogeneity across the line.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 311
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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