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Enhancement in Electrical Properties of (Ba,Sr)TiO3 Films Using Tailored Oxide Electrodes

Published online by Cambridge University Press:  10 February 2011

Duck-Kyun Choi ,
Kyung-Woong Park ,
Jeong-Hee Park ,
Se-Hoon Oh ,
Boum-Seock Kim  and
Jae-Bok Lee
Duck-Kyun Choi
Affiliation:
Dept. of Inorganic Materials Engineering, Hanyang University, 17 Haengdang-dong Seongdong-ku Seoul 133–791, Korea, [email protected]
Kyung-Woong Park
Affiliation:
Dept. of Inorganic Materials Engineering, Hanyang University, 17 Haengdang-dong Seongdong-ku Seoul 133–791, Korea, [email protected]
Jeong-Hee Park
Affiliation:
Dept. of Inorganic Materials Engineering, Hanyang University, 17 Haengdang-dong Seongdong-ku Seoul 133–791, Korea, [email protected]
Se-Hoon Oh
Affiliation:
Dept. of Inorganic Materials Engineering, Hanyang University, 17 Haengdang-dong Seongdong-ku Seoul 133–791, Korea, [email protected]
Boum-Seock Kim
Affiliation:
Dept. of Inorganic Materials Engineering, Hanyang University, 17 Haengdang-dong Seongdong-ku Seoul 133–791, Korea, [email protected]
Jae-Bok Lee
Affiliation:
Dept. of Inorganic Materials Engineering, Hanyang University, 17 Haengdang-dong Seongdong-ku Seoul 133–791, Korea, [email protected]
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Abstract

Selection of a proper electrode for high dielectric material such as (Ba, Sr)TiO3 is a great concern because the deposition of BST requires a high temperature and an oxidizing atmosphere. In this study, we suggested the perovskite-type electrodes, which provide a structural match with the BST dielectric material, under the recognition that the high leakage current is associated with the structural mismatch between BST and the electrode. We studied the (Ca,Sr)RuO3 electrode of which the lattice parameter can be tuned to fit into BST by changing the Ca/Sr ratio. We also studied (Ba,Sr)RuO3 electrode which is not only structurally identical but also chemically similar to BST. In addition, the effect of doping in the BSR electrode was investigated to minimize the leakage current by proper modulation of the barrier height. The electrodes were directly deposited on an Si substrate and all the films in the experiments were deposited by RF magnetron sputtering technique. Electrical properties were measured from MIM structure. The main focus was to address the effect of Ca/Sr and Ba/Sr ratio variations in the electrodes on the resulting dielectric constant and the leakage current. The interface characteristics between the BST film and the electrode were examined in order to interpret the electrical properties of BST films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 574: Symposia BB – Multicomponent Oxide Films for Electronics , 1999 , 77
Copyright
Copyright © Materials Research Society 1999

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