Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-29T17:01:54.066Z Has data issue: false hasContentIssue false
  • English
  • Français

Embedded Piezoresistive Microcantilever Sensors: Materials for Sensing Hydrogen Cyanide Gas

Published online by Cambridge University Press:  01 February 2011

Timothy Porter ,
Tim Vail ,
Michael Eastman ,
Ray Stewart ,
Jim Reed  and
William Delinger
Timothy Porter
Affiliation:
[email protected], Northern Arizona University, Physics, Bldg. 19, Room 209, Flagstaff, AZ, 86011, United States, 928-523-2540
Tim Vail
Affiliation:
[email protected], Northern Arizona University, Flagstaff, AZ, 86011, United States
Michael Eastman
Affiliation:
[email protected], University of Texas El Paso, El Paso, TX, 79968, United States
Ray Stewart
Affiliation:
[email protected], Cantimer, Inc., Menlo Park, CA, 94025, United States
Jim Reed
Affiliation:
[email protected], Cantimer, Inc., Menlo Park, CA, 94025, United States
William Delinger
Affiliation:
[email protected], Northern Arizona University, Flagstaff, AZ, 86011, United States
Get access

Abstract

We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of hydrogen cyanide gas. EPM sensors are small, MEMS-based devices consisting of a tiny piezoresistive microcantilever partially embedded into a “sensing material” designed to respond volumetrically when exposed to the desired analyte. These EPM sensors may be very small, operate on simple and inexpensive support electronics, are highly resistant to movement or shock, may be operated by hardwire connection or wirelessly in large numbers, and are capable of detecting many different analytes. In this study, we have used EPM sensors to detect hydrogen cyanide gas. Preliminary results indicate that the EPM sensors provide a fast response (less than 5 seconds) to levels of HCN that may be lethal to humans.

Keywords

piezoresponsesensornanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 915: Symposium R – Nanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications , 2006 , 0915-R04-09
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Porter, T.L., Eastman, M.P., Pace, D.L. et al., Sensors and Actuators A88, 47 (2001).Google Scholar
2 Porter, T. L., Eastman, M. P., Pace, D. L. et al., Scanning 22, 1 (2000); T. L. Porter, M. P. Eastman, C. Macomber et al., Ultramicroscopy 97, 365 (2003).Google Scholar
3 Gunter, R. L., Delinger, W., Porter, T. L. et al., Medical Engineering and Physics 27, 215 (2005).Google Scholar
4 Kooser, A., Gunter, R. L., Delinger, W. G. et al., Sensors and Actuators 99(2-3), 430 (2004).Google Scholar
5 Gunter, R. L., Zhine, R., Delinger, W. et al., IEEE Sensors 4(4), 430 (2004).Google Scholar
6 Kooser, A., Manygoats, K., Eastman, M. P. et al., Biosensors and Bioelectronics 19, 503 (2003).Google Scholar
7 Gunter, R. L., Delinger, W. G., Manygoats, K. et al., Sensors and Actuators (A) A107, 219 (2003).Google Scholar