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Element Profiles of Surface Layers Created by Metal Ion Beam Assisted Deposition

Published online by Cambridge University Press:  22 February 2011

Sergei M. Duvanov ,
Alexander P. Kobzev  and
Alexander M. Tolopa
Sergei M. Duvanov
Affiliation:
Institute of Applied Physics, Ukrainian Academy of Sciences, P.O.Box 561, 244024 Sumy, Ukraine Frank Laboratory of Neutron Physics, Joint Institute for Nuclear Research, 141980 Dubna, Moscow region, Russian Federation
Alexander P. Kobzev
Affiliation:
Frank Laboratory of Neutron Physics, Joint Institute for Nuclear Research, 141980 Dubna, Moscow region, Russian Federation
Alexander M. Tolopa
Affiliation:
Institute of Applied Physics, Ukrainian Academy of Sciences, P.O.Box 561, 244024 Sumy, Ukraine Pan TAMEK, 13 Partizansky prospect, 690002 Vladivostok, Russian Federation
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Abstract

Depth profiles of elements in the surface layers of metals and metallized dielectrics were investigated by Rutherford Backscatteríng Spectrometry (RBS) (for the depth profiling of heavy elements), resonant elastic Backscattering Spectrometry (BS) of 4He+ and 1H+ (for the light elements depth profiling), Elastic Recoil Detection (ERD) of 1H+ (for depth profiling of hydrogen atoms), SIMS and AES techniques. The technological TAMEK source operated in the regime of ion beam assisted deposition (IBAD) of the metal ions (ion implantation at average beam energy ≤ 150 KeV and simultaneous deposition of the same ions at energy 100 eV) in pulse mode. Coatings were deposited on metal and glass samples at temperature of substrates T=100° C. In this report, we discuss the investigation results of samples modified by IBAD in technical vacuum produced by oil diffusion pumping. Phases like TiO, TiC, TiN, TiH are indicated in interface coating-substrate layers. The total thickness of mutually mixed metal-glass layer was found to be 400 nm and it was equal up to 3 µm for metal-metal layers. Cu/Al thin layers on a glass subsrate may be used as mirrors for powerful lasers with large (up to 5 J/cm2) energy contribution.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 845
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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