Article contents
Electrophotographic Patterning of a-Si:H
Published online by Cambridge University Press: 15 February 2011
Abstract
A novel laser-printing method for the manufacturing of the backplane circuits of active-matrix liquid-crystal displays (AMLCD) is proposed and demonstrated. Xerographic toner is used as an etch mask for amorphous silicon (a-Si:H) and for the seeding of metal lines. We also demonstrate for the first time the direct-print patterning of silicon on ∼ 50 μm thick glass foil.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1995
References
REFERENCES
- 2
- Cited by