Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-29T09:03:46.407Z Has data issue: false hasContentIssue false
  • English
  • Français

Electron Microscopy Study of the Influence of the Adhesion Layer for Pt Electrode on the Microstructure of Sol-Gel Crystallized Pzt

Published online by Cambridge University Press:  21 February 2011

Vidya Kaushik ,
Papu Maniar ,
Andrew Campbell ,
Robert Jones ,
Reza Moazzami ,
C. Joseph Mogab ,
Robert Hance  and
Ronald Pyle
Vidya Kaushik
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Papu Maniar
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Andrew Campbell
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Robert Jones
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Reza Moazzami
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
C. Joseph Mogab
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Robert Hance
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Ronald Pyle
Affiliation:
Motorola Inc., Semiconductor Products Sector, Austin, Texas 78721
Get access

Abstract

PZT ferroelectric capacitors are commonly fabricated using Pt electrodes. Crystallization in an oxygen ambient of sol-gel deposited PZT films is influenced by the nature of the adhesion layer used for the Pt electrode. Here we report results of the TEM investigation of the microstructures of PZT crystallized on Pt/Ti and Pt/TiO2 substrates. PZT films on either substrate show a two-phase microstructure consisting of larger perovskite grains and finegrained (<3nm) pyrochlore matrix. The perovskite grains are dense, free of any porosity and HRTEM shows the observed domains to be 90° <101> twins. EDS spectra detect a lower Pb/Ti ratio for the pyrochlore matrix compared to the perovskite grains. Differences between the two substrates consist of the perovskite to pyrochlore ratio and more importantly the perovskite grain size.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 209
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Myers, S.A. and Chapin, L.N., in “Ferroelectric Thin Films”, Materials Research Society Symposia Proceedings Vol. 200, 231, (1991).Google Scholar
2. Tuttle, B.A., Headley, T.J., Bunker, B.C., Schwartz, R.W., Zender, T.J., Hernandez, C.L., Goodnow, D.C., Tissot, R.J., Michael, J. and Carim, A.H., in Journal of Mater. Res. Vol. 7, (No. 7), 1876, (July 1992).Google Scholar
3. Goo, E.K.W., Mishra, R.K. and Thomas, G., in J. App. Phy. 52 (4), 2940, (1981).CrossRefGoogle Scholar
4. Rou, S.H., Graettinger, T.M., Chow, A.F., Soble, C.N., Lichtenwalner, D.J., Auciello, O. and Kingon, A.I., in “Ferroelectric Thin Films II”, Materials Research Society Symposia Proceedings. Vol. 243, 81, (1992).Google Scholar
5. Kaushik, V.S., Maniar, P., Olowolafe, J., Jones, R., Campbell, A., Hance, R. and Mogab, C.J., in Proceedings of Electron Microscopy Society of America (EMSA) 50th Annual Meeting, San Francisco Press 1364–65, (1992).Google Scholar
6. Bursill, L.A., Lin, Peng-Ju and Sellar, J.R. in Euro-Ceramics, 2.330, (1989).Google Scholar