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Electron Field Emission from Undoped and Doped DLC Films

Published online by Cambridge University Press:  10 February 2011

V.G. Litovchenko ,
A.A. Evtukh ,
N.I. Klyui ,
YU.M. Litvin ,
S.Yu. Kudzinovsky ,
A.G. Chakhovskoi  and
T. E. Felter
V.G. Litovchenko
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, 252650 Kiev, UKRAINE. Fax:(380-44) 265 83 42
A.A. Evtukh
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, 252650 Kiev, UKRAINE. Fax:(380-44) 265 83 42; E-mail:[email protected]
N.I. Klyui
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, 252650 Kiev, UKRAINE. Fax:(380-44) 265 83 42
YU.M. Litvin
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, 252650 Kiev, UKRAINE. Fax:(380-44) 265 83 42
S.Yu. Kudzinovsky
Affiliation:
Institute of Semiconductor Physics, 45 Prospekt Nauki, 252650 Kiev, UKRAINE. Fax:(380-44) 265 83 42
A.G. Chakhovskoi
Affiliation:
ECE Department, University of California, Davis, USA, CA 95616, [email protected]
T. E. Felter
Affiliation:
Lawrence Livermore national Laboratory, Livermore, [email protected]
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Abstract

Electron field emission and electrical conductivity of undoped and nitrogen doped DLC films have been investigated. The films were grown by the PE CVD method from CH4:H2 and CH4:H2:N2 gas mixtures, respectively. By varying nitrogen content in the gas mixture over the range 0 to 45%, corresponding concentrations of 0 to 8 % (atomic) could be achieved in the films. Three different gas pressures were used in the deposition chamber: 0.2, 0.6 and 0.8 Torr. Emission current measurements were performed at approximately 10−6 Torr using the diode method with emitter-anode spacing set at 20 gm. The current - voltage characteristics of the Si field electron emission arrays covered with DLC films show that threshold voltage (Vth) varies in a complex manner with nitrogen content. As a function of nitrogen content, Vth initially increases rapidly, then decreases and finally increases again for the highest concentration. Corresponding Fowler-Nordheim (F-N) plots follow F-N tunneling over a wide range. The F-N plots were used for determination of the work function, threshold voltage, field enhancement factor and effective emission area. For a qualitative explanation of experimental results, we treat the DLC film as a diamond-like (sp3 bonded) matrix with graphite-like inclusions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 558: Symposium B – Flat-Panel Displays and Sensors-Principles, Materials… , 1999 , 577
Copyright
Copyright © Materials Research Society 2000

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References

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