Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-29T07:36:33.626Z Has data issue: false hasContentIssue false
  • English
  • Français

Electroactive Polymer Based Micro-ElectroMechanical System as Biosensor Platform

Published online by Cambridge University Press:  01 February 2011

Zhimin Li ,
Suiqiong Li  and
Z.-Y. Cheng
Zhimin Li
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL36849, USA
Suiqiong Li
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL36849, USA
Z.-Y. Cheng
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL36849, USA
Get access

Abstract

A micro-electromechanical diaphragm (MEMD) as micro-sensor platform is introduced. The performance of a MEMD is compared with that of a microcantilever (MC). It is theoretically found that the sensitivity of a MEMD is about 50 times higher than that of a MC. The measured resonance frequencies in air proved the validity of the MEMD design. More importantly, the quality merit factor (Q value) of MEMD is higher than that of MC. The damping effect of liquid medium on a MEMD is much smaller than on a MC. It is experimentally demonstrated that the MEMD works well in both air and liquid.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 855: Symposium W – Mechanically Active Materials , 2004 , W3.26
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Leonard, P., Hearty, S., Brennan, J., Dunne, L., Quinn, J., Chakraborty, T., and O'Kennedy, R., Enzyme and Microbial Technology 32, 3–13 (2003).Google Scholar
2. Martin, S. P., Lamb, D. J., Lynch, J. M., and Reddy, S. M., Analytica Chimica Acta 487, 91–100 (2003).Google Scholar
3. Tamarin, O., Dejous, C., Rebiere, D., Pistre, J., Comeau, S., Moynet, D., and Bezian, J., Sensors and Actuators B-Chemical 91, 275–284 (2003).Google Scholar
4. Thundat, T., Wachter, E. A., Sharp, S. L., and Warmack, R. J., Applied Physics Letters 66, 1695–1697 (1995).Google Scholar
5. Yi, J. W., Shih, W. Y., and Shih, W. H., Journal of Applied Physics 91, 1680–1686 (2002).Google Scholar
6. Yi, J. W., Shih, W. Y., Mutharasan, R., and Shih, W. H., Journal of Applied Physics 93, 619–625 (2003).Google Scholar
7. Baselt, D. R., Fruhberger, B., Klaassen, E., Cemalovic, S., Britton, C. L., Patel, S. V., Mlsna, T. E., McCorkle, D., and Warmack, B., Sensors and Actuators B-Chemical 88, 120–131 (2003).Google Scholar
8. Ilic, B., Czaplewski, D., Craighead, H. G., Neuzil, P., Campagnolo, C., and Batt, C., Applied Physics Letters 77, 450–452 (2000).Google Scholar
9. Ilic, B., Czaplewski, D., Zalalutdinov, M., Craighead, H. G., Neuzil, P., Campagnolo, C., and Batt, C., Journal of Vacuum Science & Technology B 19, 2825–2828 (2001).Google Scholar
10. Thundat, T., Oden, P. I., and Warmack, R. J., Microscale Thermophysical Engineering 1, 185–199 (1997).Google Scholar
11. Shih, W. Y., Li, X. P., Gu, H. M., Shih, W. H., and Aksay, I. A., Journal of Applied Physics 89, 1497–1505 (2001).Google Scholar
12. Blevins, R. D., Formulas for Natural Frequency and Mode Shape (Krieger Publishing Company, Reissue edition, 2001).Google Scholar