Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-29T09:48:02.740Z Has data issue: false hasContentIssue false

Elastic Constants of Nanometer Thick Diamond-like Carbon Films

Published online by Cambridge University Press:  21 March 2011

Marco G. Beghi
Affiliation:
INFM and Nuclear Engineering Department, Politecnico di Milano, I-20133 Milan, Italy
Carlo E. Bottani
Affiliation:
INFM and Nuclear Engineering Department, Politecnico di Milano, I-20133 Milan, Italy
Andrea LiBassi
Affiliation:
INFM and Nuclear Engineering Department, Politecnico di Milano, I-20133 Milan, Italy
Rosanna Pastorelli
Affiliation:
INFM and Nuclear Engineering Department, Politecnico di Milano, I-20133 Milan, Italy
Brian K. Tanner
Affiliation:
Physics Department, University of Durham, Durham, DH1 3LE, UK
Andrea C. Ferrari
Affiliation:
Engineering Department, Cambridge University, Cambridge CB2 1PZ, UK
John Robertson
Affiliation:
Engineering Department, Cambridge University, Cambridge CB2 1PZ, UK
Get access

Abstract

Carbon films of thickness down to 2 nanometers are necessary to achieve a storage density of 100 Gbit/in2 in magnetic hard disks. Reliable methods to measure the properties of these ultrathin films still have to be developed. We show for the first time that combining Surface Brillouin Scattering (SBS) and X-ray reflectivity measurements the elastic constants of such films can be obtained. Tetrahedral amorphous carbon films were deposited on silicon, by an S bend filtered cathodic vacuum arc, which provides a continuous coverage on large areas free of macroparticles. Films of thickness down to 2 nm and density of ∼3 g/cm3 were produced and characterized. The dispersion relations of surface acoustic waves are measured by SBS for films of different thickness and for the bare substrate. Waves can be described by a continuum elastic model. Fitting of the dispersion relations, computed for given film properties, to the measured dispersion relations allows the derivation of the elastic constants. Fora 8 nm thick film we find a Young's modulus E around 400 GPa, with a shear modulus G lying in the 130 – 210 GPa interval. For a 4.5 nm thick film, E is around 240 GPa, with G lying in the 70 – 130 GPa interval. Results for even thinner films become highly sensitive to the precision of the substrate properties, and indicate that the above values are lower bounds. We thus show that we can grow and characterize nanometer size tetrahedral amorphous carbon films, which maintain their density and mechanical properties down to the nm range.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Goglia, P. R., Berkowitz, J., Hoehn, J., Xidis, A. and Stover, L., Diamond Relat. Mater. 10, 271277 (2001)Google Scholar
2. Robertson, J., Thin Solid Films 383, 8188 (2001)Google Scholar
3. Pharr, G.M., Callahan, D.L., McAdams, S.D., Tsui, T.Y., Anders, S., Ager, J.W., Brown, I.G., Bhatia, C.S., Silva, S.R.P. and Robertson, J., Appl. Phys. Lett., 68, 779 (1996)Google Scholar
4. Knapp, J.A., Follstaedt, D.M., Myers, S. M., Barbour, J.C. and Friedmann, T. A., J. Appl. Phys. 85, 1460 (1999)Google Scholar
5. Friedmann, T. A., Sullivan, J. P., Knapp, J.A., Tallant, D. R., Follstaedt, D.M., Medlin, D. L. and Mirkarimi, P. B., Appl. Phys. Lett., 71, 3820 (1997)Google Scholar
6. Grimsditch, M., in Handbook of elastic properties of solids, liquids and gases, Vol. 1, ed. by Levy, M. et al. Academic Press / Harcourt Publishers Ltd., Sidcup, UK, 2000.Google Scholar
7. Comins, J. D., in Handbook of elastic properties of solids, liquids and gases, Vol. 1, ed. by Levy, M. et al. Academic Press / Harcourt Publishers Ltd., Sidcup, UK, 2000.Google Scholar
8. Zinin, P. P., , Manghnani, M. H.., Tlechev, S., Askarpour, V., Lefeuvre, O. and Every, A., Phys. Rev. B, 60 2844 (1999).Google Scholar
9. Beghi, M.G., Bottani, C.E., Ossi, P.M., Lafford, T. and Tanner, B.K., J. Appl. Phys., 81, 672 (1997), and references thereinGoogle Scholar
10. Ferrari, A.C., Robertson, J., Beghi, M.G., Bottani, C.E., Ferulano, R. and Pastorelli, R., Appl. Phys. Lett. 75, 1893 (1999)Google Scholar
11. Ferrari, A.C., Robertson, J., Pastorelli, R., Beghi, M.G. and Bottani, C.E., Mat. Res. Soc., Symp. Proc. 594, 289 (2000)Google Scholar
12. Beghi, M.G., Bottani, C.E., and Pastorelli, R., in Mechanical Properties of Structural Films, ASTM STP 1413, ed. by Muhlstein, C. and Brown, S. B., American Society for Testing and Materials, West Conshohocken, PA, 2001.Google Scholar
13. Teo, K.B.K., Rodil, S.E., Tsai, J. T. H., Ferrari, A. C., Robertson, J. and Milne, W.I., J. Appl. Phys. 89, 3706 (2001)Google Scholar
14. Ferrari, A.C., LiBassi, A., Tanner, B. K., Stolojan, V., Yuan, J., Brown, L. M., Rodil, S. E., Kleinsorge, B., and Robertson, J., Phys. Rev. B 62, 11089 (2000).Google Scholar
15. Tanner, B.K., LiBassi, A., Ferrari, A.C. and Robertson, J., these Proceedings. Google Scholar
16. Farnell, G.W. and Adler, E.L., in Physical Acoustics, Vol. 9, ed. by Mason, W. P. and Thurston, R. N., Academic, New York, 1972, p.35 Google Scholar
17. Pastorelli, R., Tarantola, S., Beghi, M.G., Bottani, C.E., and Saltelli, A., in Mechanical Properties of Structural Films, ASTM STP 1413, ed. by Muhlstein, C. and Brown, S. B., American Society for Testing and Materials, West Conshohocken, PA, 2001.Google Scholar
18. Pastorelli, R., Tarantola, S. S., , Beghi, M.G., Bottani, C.E. and Saltelli, A., Surf. Sci. 468, 37 (2000).Google Scholar
19. Stoddart, R.P., Crowhurst, J. C., Every, A. G. and Comins, J.D, J.Opt. Soc. of America B, 15, 2481 (1998)Google Scholar
20. McSkimin, H.J. and Andreatch, P., J. Appl. Phys. 35, 3312 (1964)Google Scholar