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Elastic Constants and Viscosity of Amorphous PdSi/PdSiFe Multilayers

Published online by Cambridge University Press:  22 February 2011

Ann Witvrouw
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138.
Pamela Campos
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138.
Frans Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138.
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Abstract

The biaxial elastic constants and viscosity between 100 and 300 °C of amorphous PdSi/PdSiFe multilayered thin films with repeat lengths between 2.0 and 4.9 nm have been determined using substrate curvature measurements. No dependence on repeat length has been seen for either property. Linear increases of the multilayer viscosities with time are observed. An analysis of the viscous flow of multilayers shows that in the present case this regime is reached after a very short transient period.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Kadin, A.M. and Keem, J.E., Scripta Met. 20, 443 (1986)CrossRefGoogle Scholar
2. Cammarata, R.C., Scripta Met. 20, 479 (1986)CrossRefGoogle Scholar
3. Spaepen, F., Mat. Res. Soc. Proc. 37, 295 (1985)CrossRefGoogle Scholar
4. Witvrouw, A. and Spaepen, F., Mater. Res. Soc. Symp. Proc. 188, 147 (1990)CrossRefGoogle Scholar
5. Witvrouw, A., Volkert, C.A. and Spaepen, F., Mat. Sci. Eng. A134, 1274 (1991) The values used in the present paper for η arc slightly different (Δη < 35GPa) from those in rcf (4) and (5) due to calibration corrections.CrossRefGoogle Scholar
6. Spaepen, F., Greer, A.L., Kelton, K.F. and Bell, J.L., Rev. Sci. Instrum. 56 (7), 1340 (1985)CrossRefGoogle Scholar
7. Goldman, L.M., Atwater, H.A. and Spaepen, F., Mater. Res. Soc. Symp. Proc. 160, 557 (1990)Google Scholar
8. Chen, L.C. and Spaepen, F., J. Appl. Phys. 69 (2), 679 (1991)CrossRefGoogle Scholar
9. Nix, W.D., Metall. Trans. A 20A, 2217 (1989)CrossRefGoogle Scholar
10. Flinn, P.A., Gardner, D.S., Nix, W.D., IEEE Trans. Electron Devices ED-34 (3), 689 (1987)CrossRefGoogle Scholar
11. Doerner, M.F., and Nix, W.D., CRC Critical Reviews in Solid State and Materials Science 14, 225 (1988)CrossRefGoogle Scholar
12. Brantley, W.A., J. Appl. Phys. 44 (1), 534 (1973)CrossRefGoogle Scholar
13. catalog, Heraeus, fused quartz and fused silica for optics (Heraeus Amersil, Inc., Buford, GA)Google Scholar
14. Swenson, C.A., J. Phys. Chem. Ref. Data, 12 (2), 179 (1983)Google Scholar
15. Kursumovié, A., Scott, M.G., Girt, E. and Cahn, R.W., Scripta Met. 14, 1303 (1980)CrossRefGoogle Scholar
16. Taub, A.I. and Spaepen, F., Acta Metall. 28, 1781 (1980)CrossRefGoogle Scholar
17. Tsao, S.S. and Spaepen, F., Acta Metall. 33, 881 (1985)CrossRefGoogle Scholar
18. Tsao, S.S. and Spaepen, F., Acta Metall. 33, 891 (1985)CrossRefGoogle Scholar
19. Chen, H.S., Scripta Met. 9, 411 (1975)CrossRefGoogle Scholar
20. Steams, D.G., J. Appl. Phys., 65, 491 (1989)Google Scholar
21. Ross, C.A., Goldman, L.M. and Spaepen, F., Mater. Res. Soc. Symp. Proc. 160, 571 (1990)CrossRefGoogle Scholar