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Effects of Transient Diffusion on Ipvd Feature Scale Evolution

Published online by Cambridge University Press:  10 February 2011

G. -S. Kim ,
U. P. Hansen ,
S. T. Rodgers  and
K. F Jensen
G. -S. Kim
Affiliation:
Department of Chemical Engineering, Massachusetts Institute Technology, Cambridge, MA, 02139, USA
U. P. Hansen
Affiliation:
Department of Chemical Engineering, Massachusetts Institute Technology, Cambridge, MA, 02139, USA Walter Schottky Institute, Technical University of Munich, D-85748 Garching, Germany
S. T. Rodgers
Affiliation:
Department of Chemical Engineering, Massachusetts Institute Technology, Cambridge, MA, 02139, USA
K. F Jensen
Affiliation:
Department of Chemical Engineering, Massachusetts Institute Technology, Cambridge, MA, 02139, USA
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Abstract

We present a simulation study of the long range diffusion behavior of impinging atoms during ionized physical vapor deposition conditions with focus on grazing angles of incidence and kinetic energies in the range of 35 eV to 50 eV. Two different types of long range diffusion processes are observed and investigated: (1) diffusion of atoms ultimately adsorbing and (2) diffusion of atoms that eventually desorb. The simulations reveal that the second case is particularly pronounced for grazing angles and high kinetic energies, since the adsorption probability is very low under those conditions. In a further step, information about diffusion lengths is incorporated into a previously developed level set profile simulator to predict thin film topologies. These feature scale simulations show that long-range diffusion diminishes “macroscopic” grooving.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 585: Symposium L – Fundamental Mechanisms of Low-Energy-Beam Modified Surface , 1999 , 15
Copyright
Copyright © Materials Research Society 2000

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