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Effects of Ru vacancies and oxygen synthesis pressures on the formation of nanodomain structures in SrRuO3 thin films

Published online by Cambridge University Press:  01 February 2011

Y. Z. Yoo ,
O. Chmaissem ,
S. Kolesnik ,
B. Dabrowski ,
C. W. Kimball ,
L. McAnelly ,
M. Haji-Sheikh  and
A. P. Genis
Y. Z. Yoo
Affiliation:
Institute of NanoScience, Engineering and Technology (INSET), Physics Department, Northern Illinois University, DeKalb, Illinois 60115
O. Chmaissem
Affiliation:
Institute of NanoScience, Engineering and Technology (INSET), Physics Department, Northern Illinois University, DeKalb, Illinois 60115
S. Kolesnik
Affiliation:
Institute of NanoScience, Engineering and Technology (INSET), Physics Department, Northern Illinois University, DeKalb, Illinois 60115
B. Dabrowski
Affiliation:
Institute of NanoScience, Engineering and Technology (INSET), Physics Department, Northern Illinois University, DeKalb, Illinois 60115
C. W. Kimball
Affiliation:
Institute of NanoScience, Engineering and Technology (INSET), Physics Department, Northern Illinois University, DeKalb, Illinois 60115
L. McAnelly
Affiliation:
INSET, Electrical Engineering Department, Northern Illinois University, DeKalb, Illinois 60115
M. Haji-Sheikh
Affiliation:
INSET, Electrical Engineering Department, Northern Illinois University, DeKalb, Illinois 60115
A. P. Genis
Affiliation:
INSET, Electrical Engineering Department, Northern Illinois University, DeKalb, Illinois 60115
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Abstract

SrRuO3 (SRO) thin films were grown on SrTiO3 (100) substrates using the pulsed laser deposition method. The films' growth properties widely changed in response to different working oxygen partial pressures. An island growth mode was dominant for low pressures up to 10 mTorr followed by a step flow growth mode at 60 mTorr and step flow plus 2 D growth at 200 mTorr then reverting back to island growth at 300 mTorr. Significant out-of-plane strains of SRO films were observed for low growth pressures (up to 10 mTorr) but became notably reduced at 60 mTorr and continued to decrease gradually with further pressure increases. Formation of Ru vacancies occurs regardless of the working pressure values and appears to be minimized at 60 mTorr. Highest TC's were obtained in films exhibiting the step flow growth mode. The role of Ru deficiencies in relation to strain, growth mode, and magnetic properties is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 875: Symposium O – Thin Films - Stresses and Mechanical Properties XI , 2005 , O12.20
Copyright
Copyright © Materials Research Society 2005

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