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Effects of Platinum Electrode Structures on Crystallinity and Electrical Properties of Mod-Prepared Pzt Capacitors

Published online by Cambridge University Press:  21 February 2011

Dennis J. Eichorst  and
Cynthia J. Baron
Dennis J. Eichorst
Affiliation:
Eastman Kodak Company, Research Laboratories, Rochester, NY 14650-2011
Cynthia J. Baron
Affiliation:
Eastman Kodak Company, Research Laboratories, Rochester, NY 14650-2011
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Abstract

The most common electrode structure for lead zirconium titanate (PZT) integrated on Si is platinum with a Ti adhesion layer. However, platinum hillocks that can lead to sample shorting may form during annealing. Careful selection of the Pt/Ti electrode architecture and deposition conditions can give nearly hillock-free electrodes. The phase development and ferroelectric properties of PZT prepared by metallo-organic decomposition (MOD) were studied as a function of Pt electrode structure and PZT composition. In addition to evaporated or sputtered Pt/Ti electrodes, Pt electrode layers were also prepared by MOD. MOD Pt layers showed no hillock formation but generally resulted in greater pyrochlore content in PZT capacitors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 201
Copyright
Copyright © Materials Research Society 1993

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