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Effects of Hydrolysis On Metallo-Organic Solution Deposition of PZT FILMS

Published online by Cambridge University Press:  28 February 2011

Russell A. Lipeles ,
Dianne J. Coleman  and
Martin. S. Leung
Russell A. Lipeles
Affiliation:
The Aerospace Corporation, Chemistry and Physics Laboratory, P.O. Box 92957, Los Angeles, CA 90245
Dianne J. Coleman
Affiliation:
The Aerospace Corporation, Chemistry and Physics Laboratory, P.O. Box 92957, Los Angeles, CA 90245
Martin. S. Leung
Affiliation:
The Aerospace Corporation, Chemistry and Physics Laboratory, P.O. Box 92957, Los Angeles, CA 90245
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Abstract

The effects of hydrolysis on the degree of polymerization during metallo-organic solution deposition of lead zirconate titanate (PZT) films have been investigated. The reaction of lead 2-ethylhexanoate, zirconium n-tetrapropoxide, and titanium tetrabutoxide in isopropanol with water were studied using thermogravimetry, specular reflectance Fourier transform infrared spectroscopy (FTIR) and optical and electron microscopy.

Films prepared from coating solutions having varying amounts of water exhibited dramatic differences in morphology. The films were spin-coated on platinum coated fused silica substrates and annealed at 525°C for 30 minutes. Unhydrolyzed coating solutions and solutions with a mole ratio of water to total metal of 0.5 yielded perovskite films with 0.5–5μm grains. A mole ratio of 1.5 (the amount of water required to completely hydrolyze the metallo–organics in the solution) formed amorphous, porous films. The stability of the prepolymerized films inhibits crystallization and densification at moderate temperatures.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 73: Symposium H – Better Ceramics Through Chemistry II , 1986 , 665
Copyright
Copyright © Materials Research Society 1986

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References

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