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Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line
Published online by Cambridge University Press: 01 February 2011
Abstract
Reliability is an important requirement for the newly developed porous low-k ILD materials that are being introduced into (BEOL). Dependence of Young's moduli, as measured by nanoindentation technique, on the environment [such as high relative humidity, water immersion and recovery] is presented along with FT-IR spectra for a number of films with different k values. Effect of the moduli changes on cracking behavior is also discussed.
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- Copyright © Materials Research Society 2007