Article contents
Effects of Deposition Parameters on the Structure, Morphology and Chemical Composition of PLZT Thin Films
Published online by Cambridge University Press: 15 February 2011
Abstract
PLZT thin films from a stoichiometric (9/65/35) commercial target were laser deposited using the second and third harmonics of a nanosecond Nd:YAG laser. The films were grown on oriented sapphire substrates and analysed by X-ray diffraction, SEM and EDX techniques. The influence of the deposition parameters laser fluence and substrate temperature on the physical characteristics of the films is presented.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1994
References
- 1
- Cited by