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Effect of Zr/Ti Ratio on The Fatigue and Retention Behavior of Sol-Gel Derived Pzt Films

Published online by Cambridge University Press:  21 February 2011

G. Teowee ,
J.M. Boulton ,
M.N. Orr ,
C.D. Baertlein ,
R.K. Wade ,
D.P. Birnie III  and
D.R. Uhlmann
G. Teowee
Affiliation:
Donnelly Corp., 4545 E. Ft. Lowell Rd., Tucson, AZ 85712 Arizona Materials Laboratories, Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
J.M. Boulton
Affiliation:
Arizona Materials Laboratories, Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
M.N. Orr
Affiliation:
Arizona Materials Laboratories, Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
C.D. Baertlein
Affiliation:
Arizona Materials Laboratories, Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
R.K. Wade
Affiliation:
Arizona Materials Laboratories, Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
D.P. Birnie III
Affiliation:
Arizona Materials Laboratories, Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
D.R. Uhlmann
Affiliation:
Arizona Materials Laboratories, Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
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Abstract

A series of sol-gel derived PZT films with various Zr/Ti ratios - namely PT, 0/100 - 20/80, 35/65, 53/47, 65/35, 80/20, 94/6 and PZ, 100/0 - were prepared on platinized Si wafers. Excess PbO was added to the precursor chemistries to compensate for eventual PbO loss and also to aid in obtaining the desired perovskite phase.

It was found that the phase assembly, namely the presence of tetragonal or rhombohedral perovskite phases, plays an important role in determining the fatigue and retention behavior. PT-rich (or tetragonal) films offer better retention characteristics than those observed in PZ-rich (or rhombohedral) or PZT 53/47 films. Films with PZrich compositions tend to exhibit superior fatigue behavior compared with PT-rich films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 423
Copyright
Copyright © Materials Research Society 1993

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