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The Effect of Tungsten on the Nucleation and Growth of thin Aluminum Alloy Films

Published online by Cambridge University Press:  15 February 2011

Bea CAO ,
N. David Theodore ,
Hank Shin ,
Peter Fejes  and
Les Hendrickson
Bea CAO
Affiliation:
Motorola Inc., Materials Research and Strategic Technologies, Mesa, AZ
N. David Theodore
Affiliation:
Motorola Inc., Materials Research and Strategic Technologies, Mesa, AZ
Hank Shin
Affiliation:
Motorola Inc., Materials Research and Strategic Technologies, Mesa, AZ
Peter Fejes
Affiliation:
Motorola Inc., Materials Research and Strategic Technologies, Mesa, AZ
Les Hendrickson
Affiliation:
Arizona State University, Dept. of Chemical, Bio and Materials Engineering, Tempe, AZ
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Abstract

A variety of alloying elements are currently being investigated for their effects on the mechanical properties and reliability of thin aluminum films. In the present study, scanning electron microscopy and transmission electron microscopy are used to study the nucleation and growth of Al-1.5wt%Cu and Al-1.5wt% Cu-0.2wt% W films. Differences in Microstructure, nucleation and growth behavior are observed and are explained in terms of changes in surface energies and atomic Mobilities.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993 , 227
Copyright
Copyright © Materials Research Society 1994

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References

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