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Effect of Substrate Orientation on CdTe Film Growth by OMVPE
Published online by Cambridge University Press: 25 February 2011
Abstract
Most CdTe epilayers grown by OMVPE have been deposited on two low index orientations: {111}Te and {100}. In this study we have examined the OMVPE of CdTe as a function of deposition temperature on CdTe substrates having the four low index orientations ({111}Te, P111}Cd, {110}, and {100}) and on the {211}Te and {211}Cd orientations. Results are presented for deposition rate, surface morphology, and structural quality of the epilayers.
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- Copyright © Materials Research Society 1991
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