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Effect of Substrate Orientation on CdTe Film Growth by OMVPE

Published online by Cambridge University Press:  25 February 2011

D.W. Snyder ,
E.I. Ko ,
S. Mahajan  and
P.J. Sides
D.W. Snyder
Affiliation:
Alcoa Electronic Packaging, Inc., Alcoa Center, PA 15069
E.I. Ko
Affiliation:
Department of Chemical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213
S. Mahajan
Affiliation:
Department of Metallurgical Engineering and Materials Science, Carnegie Mellon University, Pittsburgh, PA 15213
P.J. Sides
Affiliation:
Department of Chemical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213
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Abstract

Most CdTe epilayers grown by OMVPE have been deposited on two low index orientations: {111}Te and {100}. In this study we have examined the OMVPE of CdTe as a function of deposition temperature on CdTe substrates having the four low index orientations ({111}Te, P111}Cd, {110}, and {100}) and on the {211}Te and {211}Cd orientations. Results are presented for deposition rate, surface morphology, and structural quality of the epilayers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 216: Symposium T – Long-Wavelength Semiconductor Devices, Materials and Processes , 1990 , 41
Copyright
Copyright © Materials Research Society 1991

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References

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