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The Effect of Patterned vs. Unpatterned Acoustic Bragg Reflector on Barium Strontium Titanate Solidly Mounted Resonator

Published online by Cambridge University Press:  07 July 2011

George N. Saddik  and
Robert A. York
George N. Saddik
Affiliation:
University of California Santa Barbara, Department of Electrical and Computer Engineering, Santa Barbara, CA 93106, U.S.A.
Robert A. York
Affiliation:
University of California Santa Barbara, Department of Electrical and Computer Engineering, Santa Barbara, CA 93106, U.S.A.
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Abstract

Barium strontium titanate solidly mounted resonators were fabricated with patterned and unpatterned acoustic Bragg reflectors on a sapphire substrate. The patterned and unpatterned solidly mounted resonator devices had acoustic Bragg reflectors consisting of Pt/SiO2/Pt/SiO2. The s-parameters of both devices were measured. The results showed that the quality factor increased for the device with the patterned acoustic Bragg reflector structure. The quality factors for the devices with patterned and unpatterned acoustic Bragg reflector structures were 54 and 115 and 28 and 86, respectively at the resonant and antiresonant frequencies. This investigation shows how an unpatterened acoustic Bragg reflector can contribute to the degradation of the overall quality factor of the device.

Keywords

acousticferroelectricpiezoelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1368: Symposium WW – Multiferroic, Ferroelectric, and Functional Materials, Interfaces and Heterostructures , 2011 , mrss11-1368-ww11-42
Copyright
Copyright © Materials Research Society 2011

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References

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