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EBL/NIL fabrication and characterization of interdigitated electrodes for potential application in combinatorial studies.

Published online by Cambridge University Press:  01 February 2011

Lars Henrik Dæhli Skjolding
Affiliation:
[email protected], Lund University, Div. Solid State Physics, Box 118, Lund, SE-221 00, Sweden, (+ 46) 46 222 14 72, (+ 46) 46 222 36 37
Christer Spégel
Affiliation:
[email protected], Lund University, Department of Analytical Chemistry, Box 124, Lund, SE-221 00, Sweden
Jenny Emnéus
Affiliation:
[email protected], Technical University of Denmark, Department of Micro and Nanotechnology, Kgs. Lyngby, DK-2800, Denmark
Lars Montelius
Affiliation:
[email protected], Lund University, Division of Solid State Physics, Box 118, Lund, SE-22100, Sweden
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Abstract

Electrochemical transducers are frequently used to electrochemically deposit, synthesize and/or sense chemical compounds in material science, chemistry and biology. Traditionally this is done in fairly large volumes; generally several milliliters to even full production scale tanks, however, for high throughput measurements and combinatorial experiments smaller volumes are generally preferred. To probe small volumes small electrodes with preferable high density are needed. Presented in this paper is how to fabricate interdigitated electrodes by electron beam lithography (EBL) and also how to make large quantities by nanoimprint lithography (NIL) to enable combinatorial studies of cells or materials in microsystems (Lab-on-a-Chip Systems).

Interdigitated electrodes are shown to have additional advantages compared to simple disk or rod electrodes, such as being able to perform redox cycling experiments. The collection efficiency for the electrodes with pitch of 400 nm and width of 200 nm fabricated by EBL has been found to be round 87% when characterized electrochemically using ferro-/ferricyanide. The shape of the cyclic voltammograms for the electrodes are also in good agreement with the theoretical expectations for ultramicroelectrodes. Hence, these electrodes should be ideal candidates for combinatorial and high-throughput studies based on electrochemical methods.

Furthermore, a fabrication process based on nanoimprint lithography (NIL) is demonstrated, this could potentially ease fabrication and reduce cost of devices. The NIL process is based on thermal imprinting in PMMA 950k and LOR 0.7A.

Type
Research Article
Copyright
Copyright © Materials Research Society 2008

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