Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-27T02:32:09.162Z Has data issue: false hasContentIssue false
  • English
  • Français

Dynamic Modelling of CVD for Real-Time Control of Microstructure

Published online by Cambridge University Press:  15 February 2011

M.A. Gevelber ,
M.T. Quiñones  and
M.L. Bufano
M.A. Gevelber
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
M.T. Quiñones
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
M.L. Bufano
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
Get access

Abstract

A nonlinear dynamic model of the chemical vapor deposition (CVD) process has been developed and analyzed to obtain insight into the design of an appropriate control structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 363 , 1994 , 33
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Fotiadis, D.I., et.al., Journal of Crystal Growth, v. 100, 577–599, 1990.Google Scholar
[2] Spear, K.E., Proc. of the 51h European Conference on CVD, 1985.Google Scholar
[3] Ulacia, F., Howell, S., Korner, H., and Werner, C., Applied Surface Science, v. 38, 370–385,1989.Google Scholar
[4] Nakanishi, N., Mori, S., and Kato, E., J. Electrochem. Soc., v. 137, n. 1, 322–328, 1990.Google Scholar
[5] Dekker, J.P., et al. , J. Electrochem Soc., Vol. 141, No. 3, p. 787, 1994.Google Scholar
[6] Gevelber, M.A. et.al., submitted to the Journal of Dynamic Syst., Meas. and Control, Sept. 1993, appears in ACC Conference Proceedings June 1994, p 2623.Google Scholar
[7] Gevelber, M.A., Toledo-Quifiones, M., and Bufano, M., in the Proceedings of the 1994 Japan-USA Symposium on Flexible Automation, Kobe Japan, July 1994, p 1417.Google Scholar
[8] You, M.S., Nakanishi, N., and Kato, E., J. Electrochem. Soc., Vol. 138, No. 5, 1991, p 1394.Google Scholar
[9] Bird, R.B., Stewart, W.E., and Lightfoot, W.N., “Transport Phenomena”, John Wiley & Sons, 1960.Google Scholar