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Dynamic Modelling of CVD for Real-Time Control of Microstructure

Published online by Cambridge University Press:  15 February 2011

M.A. Gevelber ,
M.T. Quiñones  and
M.L. Bufano
M.A. Gevelber
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
M.T. Quiñones
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
M.L. Bufano
Affiliation:
Manufacturing Engineering, Boston University, 44 Curnmington St., Boston MA 02215
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Abstract

A nonlinear dynamic model of the chemical vapor deposition (CVD) process has been developed and analyzed to obtain insight into the design of an appropriate control structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 363 , 1994 , 33
Copyright
Copyright © Materials Research Society 1995

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References

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