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Ductility Enhancement and Mechanical Properties of Ibad Ceramic thin films
Published online by Cambridge University Press: 26 February 2011
Abstract
Thin ceramic films (A12O3 ZrO2, Si3N4, and BN) have been prepared by ion beam assisted deposition (IBAD) and their mechanical properties examined. The films exhibit extreme ductility and adhesion, with the former property possibly attributed to the very fine grained, quasi-amorphous grain structure noted for low temperature IBAD coatings.
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- Copyright © Materials Research Society 1991
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