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Dielectric Properties and Leakage Current Characteristics of Al2O3 Thin Films with Thickness Variation

Published online by Cambridge University Press:  21 March 2011

Jae-Hoon Choi ,
Ji-Woong Kim  and
Tae-Sung Oh
Jae-Hoon Choi
Affiliation:
Department of Metallurgical Engineering and Materials Science, Hong Ik University, Seoul 121-791, Korea
Ji-Woong Kim
Affiliation:
Department of Metallurgical Engineering and Materials Science, Hong Ik University, Seoul 121-791, Korea
Tae-Sung Oh
Affiliation:
Department of Metallurgical Engineering and Materials Science, Hong Ik University, Seoul 121-791, Korea
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Abstract

Dielectric properties and leakage current characteristics of the Al2O3 thin films, deposited by reactive sputtering at room temperature, have been investigated with variations of the O2 content in the sputtering gas and the film thickness. The Al2O3 films of 10-300 nm thickness were amorphous without depending on the O2 contents of 25-75% in the sputtering gas. Maximum dielectric constant was obtained for the Al2O3 film deposited with the sputtering gas of 50% O2 content. With reduction of the film thickness from 300 nm to 10 nm, dielectric constant decreased from 9.04 to 3.71 and tangent loss increased from 0.0035 to 0.0594, respectively. When the O2 content in the sputtering gas was higher than 50%, the Al2O3 films exhibited no shift of the flatband voltage in C-V curves. The leakage current density increased with increasing the film thickness, and the Al2O3 films thinner than 100 nm exhibited the leakage current densities lower than 10−6 A/cm up to 650 kV/cm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 666: Symposium F – Transport and Microstructural Phenomena , 2001 , F3.5
Copyright
Copyright © Materials Research Society 2001

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References

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