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Development of Tailored Films and Surfaces for Use in Advanced Chemical Sensors

Published online by Cambridge University Press:  15 February 2011

Steve Semancik  and
Richard Cavicchi
Steve Semancik
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland
Richard Cavicchi
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland
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Abstract

The microstructure found at the surfaces and interfaces of active sensing materials can strongly affect the performance of solid state chemical sensors. This paper desribes research efforts aimed at improving oxide semiconductor-based gas sensors which utilize changes in conductance and diode current-voltage measurements as detection schemes. Studies of oxide surface modification and the formation of Pd/SnO2(110) and Pd/TiO2(110) interfaces are discussed as are the electrical changes for these systems induced by H2 or O2 adsorption. The fabrication of heteroepitaxial SnO2 films for use in planar sensing arrays is also reported and the expected advantages of these highly-ordered, uniform films for simplifying the transducing process are described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 137
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. See, for example, Proceedings of the 3rd International Meeting on Chemical Sensors (Cleveland, 1990); Egashira, M., Matsumoto, T., Katsuki, H. and Iwanaga, H. in Proceedings of the 2nd International Meeting on Chemical Sensors (Bordeaux, 1986) p.213.Google Scholar
2. Heiland, G. in Chemical Sensor Science (Springer-Verlag, Heidelberg) - in press.Google Scholar
3. Kohl, D., Sensors and Actuators B 1, 158 (1990).Google Scholar
4. See, for example, Techniques and Mechanisms in Gas Sensing, edited by Moseley, P. T., Norris, J. O. W. and Williams, D. E. (Adam Hilger, Bristol, 1991).Google Scholar
5. Tuerkes, P., Pluntke, C. and Helbig, R., J. Physics C: Solid State Physics 13, 4941 (1980).CrossRefGoogle Scholar
6. Clifford, P. K. in Proceedings of the International Conference on Chemical Sensors, edited by Seiyama, T. (Elsevier, Fukuoka, September, 1983); A. Jones, T. A. Jones, B. Mann and J. G. Firth, Sensors and Actuators 5, 75 (1984).Google Scholar
7. Semancik, S. and Fryberger, T. B., Sensors and Actuators B1, 97 (1990).CrossRefGoogle Scholar
8. Semancik, S. and Cavicchi, R. E., Thin Solid Films 206, 81 (1991).Google Scholar
9. Poirier, G. E., Hance, B. K. and White, J. M., J.Vacuum Science and Technology B 10, 6 (1992) and references therein.Google Scholar
10. Yamazoe, N. in Proceedings of the 3rd International Meeting on Chemical Sensors (Cleveland, 1990) p. 3.Google Scholar
11. Cavicchi, R. E., Semancik, S., Antonik, M. and Lad, R. J., Applied Physics Letters - submitted.Google Scholar
12. Lad, R. J., Antonik, M., Cavicchi, R. E. and Semancik, S., to be published.Google Scholar
13. Cavicchi, R., Semancik, S., Vetrone, J. and Chung, Y., Proceedings of the 3rd International Meeting on Chemical Sensors (Cleveland, 1990) p. 377; R. Cavicchi, S. Semancik, J. Vetrone and Y. Chung, Sensors and Actuators B5 - in press.Google Scholar
14. Xu, C., Tamaki, J., Miura, N. and Yamazoe, N., Sensors and Actuators B3, 147 (1991).CrossRefGoogle Scholar
15. Erickson, J. W. and Semancik, S., Surface Science 187, L658 (1987).Google Scholar
16. Cavicchi, R., Tarlov, M. and Semancik, S., J.Vacuum Science and Technology A8, 2347 (1990).Google Scholar
17. Taguchi, N., U. K. Patent Specification 1280809.Google Scholar
18. Cavicchi, R. and Semancik, S., Surface Science 257, 70 (1991).CrossRefGoogle Scholar
19. Cavicchi, R. E. and Semancik, S., to be published.Google Scholar
20. Fryberger, T. B., Erickson, J. W. and Semancik, S., Surface and Interface Science 14, 83 (1989).CrossRefGoogle Scholar
21. Semancik, S. and Fryberger, T. B. in Proceedings of the 3rd International Meeting on Chemical Sensors (Cleveland, 1990) p. 23; S. Semancik and T. B. Fryberger, Sensors and Actuators B 5 - in press.Google Scholar
22. Fryberger, T. B. and Semancik, S., Sensors and Actuators B2, 305 (1990).Google Scholar
23. Cavicchi, R. E. and Semancik, S.,unpublished data.Google Scholar
24. Yamamoto, N., Tonomura, S., Matsuoha, T. and Tsubomura, H., Surface Science 92, 400 (1980).Google Scholar
25. See, for example, Singh-Boparai, S. P., Bowker, M. and King, D. A., Surface Science 53, 55 (1975).Google Scholar