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Development of Si Microliquid Processing using Piezo Actuator

Published online by Cambridge University Press:  27 June 2011

Muneki Akazawa ,
Shunki Koyanagi  and
Seiichiro Higashi
Muneki Akazawa
Affiliation:
Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima University, Kagamiyama 1-3-1, Higashi-Hiroshima, 739-8530, Japan
Shunki Koyanagi
Affiliation:
Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima University, Kagamiyama 1-3-1, Higashi-Hiroshima, 739-8530, Japan
Seiichiro Higashi
Affiliation:
Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima University, Kagamiyama 1-3-1, Higashi-Hiroshima, 739-8530, Japan
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Abstract

The tip of a Si rod was melted by laser diode (LD) irradiation and we succeeded in dropping small Si droplets by vibration of the Si rod using a piezo actuator. We confirmed multiple small Si droplets under a condition of the resonance frequency of 5.8 kHz for the rod length of 6.0 mm. We observed ejection of droplets from a cone edge of molten Si and the minimum width of the solidified Si was ∼ 1 μ m in diameter. The solidified Si show high crystallinity with the Raman scattering TO phonon band of 515.6 cm-1.

Keywords

Sirapid solidificationcrystal growth
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1321: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology , 2011 , mrss11-1321-a13-02
Copyright
Copyright © Materials Research Society 2011

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References

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