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Development Of Diamond Based Power Microelectronics

Published online by Cambridge University Press:  10 February 2011

J. L. Davidson ,
W. P. Kang ,
Y. Gurbuz ,
D. V. Kerns ,
L. Davis ,
K. Holmes ,
L. Jiang ,
Venkata Pulugurta ,
W. Anurat  and
M. Howell
J. L. Davidson
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
W. P. Kang
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
Y. Gurbuz
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
D. V. Kerns
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
L. Davis
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
K. Holmes
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
L. Jiang
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
Venkata Pulugurta
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
W. Anurat
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
M. Howell
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, [email protected]
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Abstract

Diamond based power device structures such as resistor, capacitor, Schottky diode, p-n diode, thyristor, and field emitters are being investigated. Diamond resistors similar to standard thick film components in form and dimension were fabricated of polycrystalline diamond film. Using PECVD (plasma-enhanced chemical vapor deposition) processing to achieve diamond dielectric layers, high power, high energy density capacitors have been built. Despite grain boundaries and defects of polycrystalline diamond film, electronic devices such as field-effecttransistors and Schottky diodes have been developed. We have fabricated micro-patterned microtip arrays with this versatile new diamond technology as electron emitters. This paper will review diamond technology and results of this work.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 483: Symposium E – Power Semiconductor Materials & Devices , 1997 , 53
Copyright
Copyright © Materials Research Society 1998

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References

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