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Development of AlAsSb as a barrier material for ultra-thin-channel InGaAs nMOSFETs

Published online by Cambridge University Press:  28 June 2013

Cheng-Ying Huang ,
Jeremy J. M. Law ,
Hong Lu ,
Mark J. W. Rodwell  and
Arthur C. Gossard
Cheng-Ying Huang
Affiliation:
Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, U.S.A.
Jeremy J. M. Law
Affiliation:
Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, U.S.A.
Hong Lu
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, U.S.A.
Mark J. W. Rodwell
Affiliation:
Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, U.S.A.
Arthur C. Gossard
Affiliation:
Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, U.S.A. Materials Department, University of California, Santa Barbara, CA 93106, U.S.A.
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Abstract

We investigated AlAs0.56Sb0.44 epitaxial layers lattice-matched to InP grown by molecular beam epitaxy (MBE). Silicon (Si) and tellurium (Te) were studied as n-type dopants in AlAs0.56Sb0.44 material. Similar to most Sb-based materials, AlAs0.56Sb0.44 demonstrates a maximum active carrier concentration around low-1018 cm-3 when using Te as a dopant. We propose the use of a heavily Si-doped InAlAs layer embedded in the AlAsSb barrier as a modulation-doped layer. The In0.53Ga0.47As/AlAs0.56Sb0.44 double heterostructures with a 10 nm InGaAs well show an electron mobility of about 9400 cm2/V・s at 295 K and 32000 cm2/V・s at 46 K. A thinner 5 nm InGaAs well has an electron mobility of about 4300 cm2/V・s at 295 K. This study demonstrates that AlAs0.56Sb0.44 is a promising barrier material for highly scaled InGaAs MOSFETs and HEMTs.

Keywords

molecular beam epitaxy (MBE)III-VHall effect
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1561: Symposium CC – Gate Stack Technology for End-of-Roadmap Devices in Logic, Power and Memory , 2013 , mrss13-1561-cc01-10
Copyright
Copyright © Materials Research Society 2013 

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References

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