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Development of a Micromirror Using Piezoelectric Excited and Actuated Structures

Published online by Cambridge University Press:  15 February 2011

R. Maeda ,
C. Lee  and
A. Schroth
R. Maeda
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan, [email protected]
C. Lee
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan, [email protected]
A. Schroth
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan, [email protected]
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Abstract

The design and fabrication process of a micro-mirror device is presented. The device is driven by sol-gel deposited PZT-layer actuators. The mirror is designed to be able to carry out scanning in two lateral directions, and additionally movement in vertical direction using a FEMsimulation tool. The established fabrication process is described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 233
Copyright
Copyright © Materials Research Society 1997

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