Hostname: page-component-cd9895bd7-7cvxr Total loading time: 0 Render date: 2024-12-27T01:43:15.596Z Has data issue: false hasContentIssue false
  • English
  • Français

Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

Published online by Cambridge University Press:  11 February 2011

Edward S. Kolesar ,
Matthew D. Ruff ,
William E. Odom ,
Joseph A. Jayachandran ,
Justin B. McAllister ,
Simon Y. Ko ,
Jeffery T. Howard ,
Peter B. Allen ,
Josh M. Wilken  and
Noah C. Boydston
...Show all authors
Edward S. Kolesar
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Matthew D. Ruff
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
William E. Odom
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Joseph A. Jayachandran
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Justin B. McAllister
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Simon Y. Ko
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Jeffery T. Howard
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Peter B. Allen
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Josh M. Wilken
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Noah C. Boydston
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Jorge E. Bosch
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Richard J. Wilks
Affiliation:
Texas Christian University, Department of Engineering, TCU Box 298640, 2800 South University Drive, Fort Worth, TX 76129, U.S.A.
Get access

Abstract

This research focuses on the design and experimental characterization of two types of MEMS asymmetrical electrothermal microactuators. Both microactuator design variants use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements of both microactuators as a function of applied electrical power are presented. Also described is the practical integration of the electrothermal microactuators in a monolithic microengine that is capable of rotating a set of gears.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J5.3
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Ristic, L. (ed.), Sensor Technology and Devices, (Artech House, Norwood, MA, 1994).Google Scholar
2. Pan, C.S. and Hsu, W., J. Micromech. Microeng., 7, 1997, 13 (1997).Google Scholar
3. Guckel, H., Klein, J., Cristenson, T., Skrobis, K., Laudon, M. and Lovell, E.G., “Thermo-magnetic metal flexure actuators,” Tech. Dig. Solid-State Sen. Act. Workshop, Hilton Head Island, SC, June 22–25, 1992, pp. 73–75.Google Scholar
4. Comtois, J.H. and Bright, V.M. in Tech. Dig. Solid-State Sen. Act. Workshop (Hilton Head Island, SC, June 2–6, 1996) pp. 174–176.Google Scholar
5. Fedder, G.K. and Howe, R.T., Proc. IEEE Micro Electro Mechanical Systems Workshop (Nara, Japan, January 30 – February 2, 1991) pp. 63–68.Google Scholar
6. Allen, P.B., Wilken, J.M. and Kolesar, E.S., Proc. 1997 ASEE Conf. (Houston, TX, March 23–25, 1997) pp. 43–48.Google Scholar
7. Burns, D.N. and Bright, V.M., (Proc. SPIE, 3224, October 1997) pp. 296–306.Google Scholar
8. Kolesar, E.S., Alen, P.B., Howard, J.T. and Wilken, J.M., J. Vac. Sci. Technol. A, 17(4), 1999, 2257 (1999).Google Scholar
9. L-Edit® CAD Software Manual, version 7, Tanner Research, Inc., 180 North Vinedo Avenue, Pasadena, CA 91107.Google Scholar
10. Koester, D., Mahedevan, R., Shishkoff, A. and Markus, K., Multi-User MEMS Processes (MUMPS) Introduction and Design Rules, revision 4, JDS Uniphase MEMS Technology Applications Center, 3021 Cornwallis Road, Research Triangle Park, NC 27709.Google Scholar
11. Cochin, I. and Cadwallender, W., Analysis and Design of Dynamic Systems, 3rd ed., (Addison-Wesley, Reading, MA, 1997), pp. 309–353 and pp. 607–619.Google Scholar