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The Design and Fabrication of Magneto-Optic Recording Materials

Published online by Cambridge University Press:  21 February 2011

Mark H. Kryder
Mark H. Kryder*
Affiliation:
Magnetics Technology Center, Carnegie Mellon University, Pittsburgh, PA 15213-3890
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Abstract

A review of the relationships between film composition, deposition process and properties of sputtered amorphous rare earth-transition metal thin films for magneto-optical recording applications is given. It is shown that to maximize Kerr rotation, anisotropy, corrosion resistance and reflectivity, the sputtering conditions should be selected to produce Zone T featureless microstructure. Although equivalent properties may be achieved with either RF diode or DC magnetron sputtering, DC magnetron sputtering is preferred for manufacturing because of higher deposition rates and lower substrate temperatures. To maximize magnetooptic effects, alloys of Fe and Co should be used as the transition metal. It is shown that perpendicular anisotropy, coercivity, compensation temperature and Curie temperature may be adjusted over a wide range through careful selection of rare earth constituents and Fe/Co ratio. Systematic data on the dependences of the magnetic properties on film composition are given.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 150: Symposium F – Materials for Magneto-Optic Data Storage , 1989 , 3
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

1. Chaudhari, P., Cuomo, J. J. and Gambino, R. J., IBM J. Res. Develop. 17, 66 (1973).Google Scholar
2. Kryder, M. H., J. Appl. Phys., 57, 3913 (1985).Google Scholar
3. Chen, D., Otto, G. N. and Schmit, I. M., IEEE Trans. Magnet., MAG–9, 66 (1973).Google Scholar
4. Gambino, R. J., Chaudhari, P. and Cuomo, J. J., AIP Conf. Proc. No. 18, 578 (1974).Google Scholar
5. Egami, T., Graham, C. D. Jr., Dmowski, W., Zhou, P., Flanders, P. J., Marinero, E. E., Notarys, H. and Robinson, C., IEEE Trans. Magnet., MAG–23, 2269 (1978).Google Scholar
6. Cheng, S-C. N. and Kryder, M. H., Paper HQ-03, Intermag Conf., Washington, DC, to be published in IEEE Trans. Magnet., MAG-25 (1989).Google Scholar
7. Huth, B. G., IBM J. Res. Develop. 18, 100 (1974).Google Scholar
8. Kryder, M. H., Meiklejohn, W. H. and Skoda, R. E., Proc. of SPIE Symp. on Optical Mass Data Storage, 236, Arlington, VA, June 6–10, 1983.Google Scholar
9. Thornton, J. A., J. Vac. Sci. Tech., 11, 666 (1974).Google Scholar
10. Kusuda, T., Honda, S. and Ohnoshi, M., J. Appl. Phys. 53, 2338 (1982).Google Scholar
11. Shieh, H-P. D., Hong, M. and Nakahara, S., J. Appl. Phys., 63, 3627 (1988).Google Scholar
12. Shieh, H-P. D. and Kryder, M. H., IEEE Trans. Magnet., MAG–21, 1672 (1985).Google Scholar
13. Luborsky, F. E., Furey, J. T., Skoda, R. E. and Wagner, B. C., IEEE Trans. Magnet., MAG–21, 1618 (1985).Google Scholar
14. Lee, J-W., Shieh, H-P. D., Kryder, M. H. and Laughlin, D. E., J. Appl. Phys., 63, 3624 (1988).Google Scholar
15. Lee, J-W., Cheng, S-C. N., Kryder, M. H. and Laughlin, D. E., Paper F3.6, 1989 Spring Meeting of the Materials Research Society, April 24–29, 1989, San Diego, CA for publication in the Journal of Materials Research (1989).Google Scholar
16. Shieh, H-P. D., Kryder, M. H. and Lee, J-W., IEEE Trans. Magnet., MAG–24, 2446 (1988).Google Scholar
17. Burilla, C. T., Bekebrede, W. R., Kestigian, M. and Smith, A. B., J. Appl. Phys., 49, 1750 (1978).Google Scholar
18. Hairston, D. K. and Kryder, M. H., J. Appl. Phys., 63, 3621 (1988).Google Scholar
19. Hairston, D. K. and Kryder, M. H., Paper GB-03, INTERMAG '89, Washington, DC, Mar. 28–31, 1989, for publication in IEEE Trans. Magnet., Sept. 1989.Google Scholar
20. Kryder, M. H., Shieh, H-P. D. and Hairston, D. K., IEEE Trans. Magnet., MAG–23, 165 (1987).Google Scholar
21. Weng, Robert S., Wu, Jiin-Chuan, Cendes, Zoltan J. and Kryder, M. H., Paper EA-07, INTERMAG '89, Washington, DC, Mar. 28–31, 1989, for publication in IEEE Trans. Magnet., Sept. 1989.Google Scholar
22. Shieh, H-P. D. and Kryder, M. H., J. Appl. Phys., 61, 1108 (1987).Google Scholar