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Deposition of Nanocrystalline Tin (IV) Oxide Films on Organic Self-Assembled Monolayers

Published online by Cambridge University Press:  10 February 2011

S. Supothina ,
M. R. De Guire ,
T. P. Niesen ,
J. Bill ,
F. Aldinger  and
A. H. Heuer
S. Supothina
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, OH 44106–7204, U.S.A., [email protected]
M. R. De Guire
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, OH 44106–7204, U.S.A., [email protected]
T. P. Niesen
Affiliation:
Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, Heisenbergstr. 5, D-70569 Stuttgart, Germany
J. Bill
Affiliation:
Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, Heisenbergstr. 5, D-70569 Stuttgart, Germany
F. Aldinger
Affiliation:
Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, Heisenbergstr. 5, D-70569 Stuttgart, Germany
A. H. Heuer
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, OH 44106–7204, U.S.A., [email protected]
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Abstract

Nanocrystalline thin films of tin (IV) oxide (cassiterite) have been deposited from aqueous solutions of tin (IV) chloride and hydrochloric acid at 80°C. Substrates were {100} single-crystal silicon wafers, with and without silanol-anchored, sulfonate-terminated organic self-assembled monolayers (SAMs). Using flowing solutions, films with thicknesses of up to 1 μtm have been grown, whereas the thickness of the films from static solutions is limited to about 80 nm. The films were characterized using transmission electron microscopy and Rutherford backscattering spectroscopy. The role of the flow rate and configuration of the deposition chamber is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 576: Symposium DD – Organic/Inorganic Hybrid Materials II , 1999 , 203
Copyright
Copyright © Materials Research Society 1999

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References

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