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Deposition of Epitaxial Carbide Films and Superlattices by Co-Evaporation of C60 and Transition Metals

Published online by Cambridge University Press:  10 February 2011

H. Högberg ,
L. Norin ,
J Lu ,
J. O. Malm  and
U Jansson
H. Högberg
Affiliation:
Uppsala University, Dept. of Inorganic Chemistry, The Angstr6m Laboratory, Uppsala, SWEDEN.
L. Norin
Affiliation:
Uppsala University, Dept. of Inorganic Chemistry, The Angstr6m Laboratory, Uppsala, SWEDEN.
J Lu
Affiliation:
Uppsala University, Dept. of Inorganic Chemistry, The Angstr6m Laboratory, Uppsala, SWEDEN.
J. O. Malm
Affiliation:
Lund University, National Center of HREM, Dept. of Inorganic Chemistry 2, Lund, SWEDEN.
U Jansson
Affiliation:
Uppsala University, Dept. of Inorganic Chemistry, The Angstr6m Laboratory, Uppsala, SWEDEN.
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Abstract

Thin films of TiC, VC and NbC have been deposited on MgO(001) by co-evaporation of C 60 and the metal. The metal induced a decomposition of the C60 cage and a subsequent carbide formation at 100 °C. Epitaxial TiC films were easily obtained at 250 °C, while higher deposition temperatures were required for epitaxial growth of VC(400 °C) and NbC(500 °C). The films grew with the relation MeC(001)//MgO(00 1) and MeC[ 100]//MgO[ 100]. It was also possible to deposit TiC/NbC/MgO polycrystalline multilayers and TiC/VC/MgO superlattices structures by a sequential evaporation of the metals.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 13
Copyright
Copyright © Materials Research Society 1999

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References

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