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Deposition and Properties of Doped Diamondlike Carbon Films Produced by Dual-Source Vacuum Arc Plasma Immersion

Published online by Cambridge University Press:  03 September 2012

O. R. Monteiro ,
M. P. Delplancke-Ogletree ,
I. G. Brown  and
J. W. Ager III
O. R. Monteiro
Affiliation:
Lawrence Berkeley National Laboratory, University of California, Berkeley CA 94720, USA
M. P. Delplancke-Ogletree
Affiliation:
Université Libre de Bruxelles, Métallurgie-Electrochimie, 1050 Brussels, Belgium
I. G. Brown
Affiliation:
Lawrence Berkeley National Laboratory, University of California, Berkeley CA 94720, USA
J. W. Ager III
Affiliation:
Lawrence Berkeley National Laboratory, University of California, Berkeley CA 94720, USA
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Abstract

Diamond-like carbon films with mechanical properties approaching those of diamond have been consistently produced by cathodic vacuum arc based techniques. These films have been successfully used in applications where enhanced hardness and wear resistance are required Such DLC films have two major drawbacks that prevent their application in other areas: a high level of internal stresses, which promotes failure by spallation of thick films; and the loss of mechanical properties at temperatures higher than 300°C. In this paper we describe the effect of doping elements on the room-temperature mechanical properties and on the thermal stability of DLC films upon annealing in air. The effect of the presence of W and Ti was investigated and compared to pure DLC. The films were produced by dual-source metal plasma immersion ion implantation and deposition with magnetic filtering to remove macroparticles from the plasma; dopant content was controlled by varying the relative pulse duration of the two plasma sources. Microstructural and chemical characterization of the films are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 599
Copyright
Copyright © Materials Research Society 1997

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References

1. Geis, M. W. and Tamor, M. A., in Encyclopedia of Applied Physics vol.5, (VCH Publishers, Inc. 1993) p. 1 Google Scholar
2. Falabella, S., Boercker, D. B., Sanders, D. M., Thin Solid Films 236, 82 (1993)Google Scholar
3. Angus, J. C. and Hayman, C. C., Science, 249, 913 (1988)Google Scholar
4. Anders, S., Anders, A., Ager, J. W. III, Wang, Z., Pharr, G. M., Tsui, T. Y., Brown, I. G. and Bhatia, S., in _Mater. Res. Soc. Symp. Proc. 383, Pittsburgh, PA 1995) pp. 453–457 Google Scholar
5. Voevodin, A. A., Donley, M. S., Zabinski, J. S., Bultman, J. E., Surface and Coatings Technol. 77–78, 534 (1995)Google Scholar
6. Pharr, G. M., Callahan, D. L., McAdams, S. D., Tsui, T. Y., Anders, S., Anders, A., Ager, J. W. III, Brown, I. G., Bhatia, S., Silva, S. R. P. and Robertson, J., Appl. Phys. Lett. 68, 779 (1996)Google Scholar
7. Fallon, P. J., Veerasamy, V. S., Davis, C. A., Robertson, J., Amaratunga, G. A. J., Milne, W. I. and Koskinen, J., Phys. Rev. B, 48, 4777 (1993)Google Scholar
8. Knapp, J. A., Follstaedt, D. M., Barbour, J. C., Meyers, S. M., Ager, J. W. III, Brown, I. G. and Monteiro, O. R., Materials Research Society Fall Meeting 1996, Symposium on Materials Modification and Synthesis by Ion Beam Processing.Google Scholar
9. Muller, U., Hauert, R. adn Tobler, M., 6th European Conference on Applications of Surface and Interface Analysis ECASIA'95, Montreaux, Switzerland, 1995 Google Scholar
10. Oral, B., Hauert, R., Muller, U. and Ernst, K. H., Diamond and Related Mater. 4, 482 (1995)Google Scholar
11. Oral, B., Ernst, K. H. and Schmutz, C. J. Diamond and Related Mater. 5, 932 (1996).Google Scholar
12. Delplancke-Ogletree, M. P. and Monteiro, O. R., submitted to J. Appl. Phys. (1996).Google Scholar
13. Dorfman, V. F., Thin Solid Films, 212, 267 (1992).Google Scholar
14. Dimigen, H. and Klages, C. P., Surface Coatings and Technol. 49, 543 (1991).Google Scholar
15. Monteiro, O. R., Wang, Z., Hou, P. and Brown, I. G., 10th International Conference on Ion Beam Modification of Materials (IBMM-96), Albuquerque, NM 1996 (to be published in NIM-B)Google Scholar