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Dependence of Field-Effect Mobility on Deposition Conditions in a-Si:H TFT

Published online by Cambridge University Press:  16 February 2011

Y. Chida
Affiliation:
Electrotechnical Laboratory, Umezono, Tsukuba-shi, Ibaraki 305, Japan
M. Kondo
Affiliation:
Electrotechnical Laboratory, Umezono, Tsukuba-shi, Ibaraki 305, Japan
G. Ganguly
Affiliation:
Electrotechnical Laboratory, Umezono, Tsukuba-shi, Ibaraki 305, Japan
A. Matsuda
Affiliation:
Electrotechnical Laboratory, Umezono, Tsukuba-shi, Ibaraki 305, Japan
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Abstract

High electron Mobility (over 3 cm2/Vs) thin film transistors (TFTs) have been fabricated using a-Si:H on thermally oxidized crystalline Si substrate. The procedures for fabricating the high performance TFTs are presented and the possible reasons for the high mobility are discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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